Texas Instruments Corporation

John Lin

Philip Leland Hower

Sameer P Pendharkar

Steven L Merchant

Marie Denison

Guru Mathur

Scott Balster

Yongxi Zhang

Tony Thanh Phan

Vladimir Bolkhovsky

William C Loftin

David A Walch

Henry Litzmann Edwards

Binghua Hu

Constantin Bulucea

Robert Allan Neidorff

Hideaki Kawahara

Zachary K Lee

Howard S Lee

Taylor R Efland

Martin B Mollat

Victor Samuel Sinow

Steven L Jensen

Vladimir N Bolkhovsky

An integrated circuit includes an extended drain MOS transistor with parallel alternating active gap drift regions and field gap drift regions. The extended drain MOS transistor includes a gate having field plates over the field gap drift regions. The extended drain MOS transistor may be formed in a symmetric nested configuration. A process for forming an integrated circuit containing an extended drain MOS transistor provides parallel alternating active gap drift regions and field gap drift regions with a gate having field plates over the field gap drift regions.

Hybrid active-field gap extended drain MOS transistor

A semiconductor device includes at least a first transistor including at least a second level metal layer (second metal layer) above a first level metal layer coupled by a source contact to a source region doped with a first dopant type. The second level metal layer is coupled by a drain contact to a drain region doped with the first dopant type. A gate stack is between the source region and drain region having the second level metal layer coupled by a contact thereto. The second level metal layer is coupled by a contact to a first isolation region doped with the second dopant type. The source region and drain region are within the first isolation region. A second isolation region doped with the first dopant type encloses the first isolation region, and is not coupled to the second level metal layer so that it electrically floats.

Transistor having double isolation with one floating isolation

A semiconductor device contains an LDNMOS transistor with a lateral n-type drain drift region and a p-type RESURF region over the drain drift region. The RESURF region extends to a top surface of a substrate of the semiconductor device. The semiconductor device includes a shunt which is electrically coupled between the RESURF region and a low voltage node of the LDNMOS transistor. The shunt may be a p-type implanted layer in the substrate between the RESURF layer and a body of the LDNMOS transistor, and may be implanted concurrently with the RESURF layer. The shunt may be through an opening in the drain drift region from the RESURF layer to the substrate under the drain drift region. The shunt may be include metal interconnect elements including contacts and metal interconnect lines.

Structures to avoid floating resurf layer in high voltage lateral devices

Structures to avoid floating RESURF layer in high voltage lateral devices

An integrated circuit (IC) includes a substrate having a p-type semiconductor surface. A first nwell includes an area surrounding a first plurality of semiconductor devices formed in the semiconductor surface having a first n-buried layer (NBL) thereunder. A vertical diode formed in the semiconductor surface surrounds the first nwell including a pwell on top of a floating NBL ring. A second nwell formed in the semiconductor surface includes an area surrounding the floating NBL ring and surrounds a second plurality of semiconductor devices having a second NBL thereunder.

IC with floating buried layer ring for isolation of embedded islands

An integrated circuit containing a voltage divider having an upper resistor of unsilicided gate material over field oxide around a central opening and a drift layer under the upper resistor, an input terminal coupled to an input node of the upper resistor adjacent to the central opening in the field oxide and coupled to the drift layer through the central opening, a sense terminal coupled to a sense node on the upper resistor opposite from the input node, a lower resistor with a sense node coupled to the sense terminal and a reference node, and a reference terminal coupled to the reference node. A process of forming the integrated circuit containing the voltage divider.

Integrated high voltage divider

An integrated circuit containing a gate controlled voltage divider having an upper resistor on field oxide in series with a transistor switch in series with a lower resistor. A resistor drift layer is disposed under the upper resistor, and the transistor switch includes a switch drift layer adjacent to the resistor drift layer, separated by a region which prevents breakdown between the drift layers. The switch drift layer provides an extended drain or collector for the transistor switch. A sense terminal of the voltage divider is coupled to a source or emitter node of the transistor and to the lower resistor. An input terminal is coupled to the upper resistor and the resistor drift layer. A process of forming the integrated circuit containing the gate controlled voltage divider.

Integrated gate controlled high voltage divider

An electronic device has a plurality of trenches formed in a semiconductor layer. A vertical drift region is located between and adjacent the trenches. An electrode is located within each trench, the electrode having a gate electrode section and a field plate section. A graded field plate dielectric having increased thickness at greater depth is located between the field plate section and the vertical drift region.

Method of making vertical transistor with graded field plate dielectric

A semiconductor device comprising a first transistor device () on or in a semiconductor substrate () and a second transistor device () on or in the substrate. The device further comprises an insulating trench () located between the first transistor device and the second transistor device. At least one upper corner () of the insulating trench is a rounded corner in a lateral plane () of the substrate.

Isolation trench with rounded corners for BiCMOS process

A Junction Field Effect Transistor (JFET) can be fabricated with a well region that include a channel region having an average dopant concentration substantially less the average doping concentration of the remaining portions of the well region. The lower average doping concentration of channel region compared to the remaining portions of the well region reduces the pinch-off voltage of the JFET.

Distributed high voltage JFET

A semiconductor device comprising a first transistor device on or in a semiconductor substrate and a second transistor device on or in the substrate. The device further comprises an insulating trench located between the first transistor device and the second transistor device. At least one upper corner of the insulating trench is a rounded corner in a lateral plane of the substrate.

The present invention provides an integrated circuit and a method of manufacture therefore therefor. The integrated circuit (), in one embodiment without limitation, includes a dielectric layer () located over a wafer substrate (), and a semiconductor substrate () located over the dielectric layer (), the semiconductor substrate () having one or more transistor devices () located therein or thereon. The integrated circuit () may further include an interconnect () extending entirely through the semiconductor substrate () and the dielectric layer (), thereby electrically contacting the wafer substrate ().

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Chelmsford, MA, United States of America

John Lin