Sgs-thomson Microelectronics Limited

Stmicroelectronics Gmbh

John L Walters

Frank R Bryant

Tsiu Chiu Chan

Fu-Tai Liou

Che-Chia Wei

Yih-Shung Lin

Lun-Tseng Lu

Timothy Michael O'Donnell

A method is provided for forming contact via in an integrated circuit. Initially, a first buffer layer is formed over an insulating layer in an integrated circuit. The first buffer layer has a different etch rate from the insulating layer. A second buffer layer is then formed over the first buffer layer, with the second buffer layer having an etch rate which is faster than the first buffer layer. An isotropic etch is performed to create an opening through the second buffer layer and a portion of the first buffer layer. Because the second buffer layer etches faster than the first buffer layer, the slant of the sideswalls of the opening can be controlled. An anisotropic etch is then performed to complete formation of the contact via.

Semiconductor contact via structure

An interconnect structure, and method for forming same, is suitable for use in integrated circuits such as SRAM devices. The structure uses masking of a polycrystalline silicon interconnect level to move a P-N junction to a region within a polycrystalline silicon interconnect line, rather than at the substrate. This P-N junction can then be shorted out using a refractory metal silicide formed on the polycrystalline silicon interconnect structure.

Method for making local interconnect structure

Local interconnect structure

Method of forming local interconnect structure without P-N junction

A method is provided for forming contact vias in an integrated circuit. Initially, a first buffer layer is formed over an insulating layer in an integrated circuit. The first buffer layer has a different etch rate from the insulating layer. A second buffer layer is then formed over the first buffer layer, with the second buffer layer having an etch rate which is faster than the first buffer layer. An isotropic etch is performed to create an opening through the second buffer layer and a portion of the first buffer layer. Because the second buffer layer etches faster than the first buffer layer, the slant of the sideswalls of the opening can be controlled. An anisotropic etch is then performed to complete formation of the contact via.

Semiconductor contact via structure and method

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A semiconductor device is described in which a conductive layer overlaps a dielectric layer forming a composite electrical device deposited over selected portions of a semiconductor substrate chemically isolating the conductive layer portion of the composite electrical device from the substrate, thereby preventing difffusion of dopant material through the dielectric layer into and out of the conductive layer while simultaneously allowing for tunneling of electrons through the dielectric layer to and from the conductive layer and the semiconductor substrate.

Tunneling diffusion barrier for local interconnect and polysilicon high

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Carrollton, TX, United States of America

John L Walters