Average Co-Inventor Count = 6.00
ph-index = 6
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Fei Comapny (5 from 797 patents)
2. Novellus Systems Incorporated (1 from 993 patents)
6 patents:
1. 9640367 - Plasma source for a focused ion beam system
2. 8864935 - Plasma generator apparatus
3. 8829468 - Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
4. 8168957 - Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
5. 7670455 - Magnetically enhanced, inductively coupled plasma source for a focused ion beam system
6. 7241361 - Magnetically enhanced, inductively coupled plasma source for a focused ion beam system