Helix Technology Corporation

Brooks Automation Gmbh

Edwards Vacuum LLC

John J Varone

Joseph Chopy, Jr

Daniel R Jankins

Robert P Sullivan

Oliver J Dumas

Allen J Bartlett

Robert J Lepofsky

Maureen C Buonpane

Paul E Amundsen

Norbert Elsdoerfer

Doreen J Ball-DiFazio

Ronald N Morris

Leonard A Loranger

Louis F Genatossio

Timothy Clish

Randall J McDonald

John Burroughs

Rama Machireddy

Herbert McEvoy

A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

Helium management control system

A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.

Cryopump network

A portable display unit includes a serial port to connect to a device such as a vacuum network controller, cryopump, turbomolecular pump, gauges or compressor. In particular, the display unit can be plugged and unplugged to devices of different types. The portable display unit includes a display and control keys for programming, controlling and monitoring the functions of a device. The device accessible to the display unit includes a display interface having software code and files to interface with the display unit. Accordingly, the portable display unit can be used with any device having software code to interface with the display unit. The software code generates, refreshes and communicates menus to the portable display unit to provide graphical interface of the device's functions. The portable display unit further includes inner and outer hand grips so that the display unit can be held by hands of different sizes. The hand grips allow user with different hand sizes to firmly hold and navigate the display using control keys with fingers.

Remote display module

A securing mechanism includes a connector latch and a module latch such that engagement of the connector latch with a connector causes the module latch to engage a housing support. The securing mechanism prevents removal of a module from a housing support when a connector, such as on a power cable, is engaged by the connector latch. The connector latch has a position adjustment mechanism, engageable by an external tool, that controls the position of the connector latch. A tool is used to position the connector latch and allow the insertion or removal of the connector.

Module and connector latch

A vacuum network control system includes a vacuum network controller hub communicating over a public high-speed network, where the hub has an address registered with respect to the non-local network and communicates over a first local high-speed network. Vacuum network controllers (VNCs) communicate with the hub over the first local network. Each VNC has a dynamically assigned local address and communicates with at least one component intrabus module over a second local high-speed network. Each module has a dynamically assigned local address and further communicates with one or more monitor and control end units over a local device network. Each monitor and control end unit has a dynamically assigned address. Monitor and control end units include taps, which provide at least one of analog, digital or serial I/O, and components, for example, vacuum pumps. Device addresses can be dynamically assigned based on unique identification information sent by the device upon the device's initialization, where the device's assigned local address is transmitted back to the device in response.

Vacuum system information network

A cryopump system includes an integral assembly having a refrigerator, cryopumping surfaces cooled by the refrigerator, a first electronic module for controlling the cryopump, and a second electronic module which is removably coupled to the first module. The second electronic module has a first surface abutting a complementary first surface of a housing of the first electronic module. Preferably, the first controller module has three orthogonal surfaces of approximately the same dimensions. Electronic modules can be removably coupled to each of the three surfaces. The cryopump system includes a module cap which is coupled to an end of an electronic module to shield electrical connections between two coupled electronic modules. The electronic modules comprise a channel of rectangular cross section having slots for mounting printed circuit boards.

Cryopump system with modular electronics

A vacuum network controller includes a host interface for interfacing with a host controller, a component interface for interfacing with vacuum system components, a computer-readable medium storing software code, and a processor in communication with each of the preceding elements. The software code generates commands to control the vacuum system components, translates those commands into multiple communication protocols, and communicates the translated commands to the component interface. In a method embedded in a set of computer-translatable instructions, an instruction is received from a host controller. That instruction is processed to generate a command for controlling a vacuum system component. A software driver is selected from a library of drivers for communication protocols, and the selected software driver is used to translate the command into the respective protocol. Finally, the translated command is communicated to a component interface to control the operation of the vacuum system component.

Vacuum network controller

Growing community of inventors

Seekonk, MA, United States of America

John J Varone