Raytheon Company

Hughes Aircraft Company

USA as Represented by Secretary of the Navy

Hughes Electronics Corporation

Ratheon Company

John J Drab

O Glenn Ramer

Thomas K Dougherty

T Kirk Dougherty

Mary A Teshiba

Christian M Boemler

Justin Gordon Adams Wehner

Jason G Milne

David A Robinson

Andrew Peter Clarke

Faye Walker

Kathleen A Kehle

Carlos Alberto Paz De Araujo

Larry D McMillan

Daniel Frederic Sievenpiper

John L Vampola

Brian M Pierce

Sean P Kilcoyne

Matthew C Thomas

Kevin C Rolston

Stephen A Gabelich

Michael Brand

Gregory D Tracy

Chad W Fulk

Mark V Martin

Edward Robert Soares

Christopher Lynn Mears

Theodore Mark Kellum

Christine Frandsen

Venita L Dyer

Solomon O Robinson

Tricia Veeder

Andrew Clarke

Barry M Starr

Christopher L Mears

A CuSn electrical interconnect and method of making same in an electrical device, such as for hybrid bond 3D-integration of the electrical device with one or more other electrical devices. The method of forming the CuSn electrical interconnect includes: depositing a Sn layer in the via hole; depositing a Cu layer atop and in contact with the Sn layer; and heating the Sn layer and the Cu layer such that the Sn and Cu layers diffuse together to form a CuSn interconnect in the via hole. During the heating, a diffusion front between the Sn and Cu layers moves in a direction toward the Cu layer as initially deposited, such that any remaining Cu layer or any voids formed during the diffusion are at an upper region of the formed CuSn interconnect in the via hole, thereby allowing such voids or remaining material to be easily removed.

CuSn via metallization in electrical devices for low-temperature 3D-integration

A through-wafer via substrate includes a substrate having an intermediate layer and a bonding layer formed on a surface of the intermediate layer. A via cavity extends through the bonding layer and into the intermediate layer, and a stress buffer liner is deposited directly on inner sidewalls and a base of the via cavity. An electrically conductive through-wafer via is disposed in the via cavity such that the stress buffer liner is interposed completely between the intermediate layer and the through-wafer via.

Oxide liner stress buffer

A communication system includes an antenna assembly. The antenna assembly includes an optical communication layer including a plurality of electro-optical (EO) antennas for communicating via an EO signal and a radio-frequency communication layer including a plurality of radio frequency (RF) antennas for communicating via an RF signal. A processor operates the antenna assembly to communicate via one or both of the EO signal and the RF signal.

Three-dimensional wafer-stacked optical and radio frequency phased array transceiver system

A method of transferring an integrated circuit (IC) onto an alternative substrate is provided at a wafer level to enable coefficient of thermal expansion (CTE) matching for a circuit layer to a different material. The method is executable relative to a wafer with a circuit layer, a first major surface, a second major surface opposite the first major surface, and a substrate affixed to the first major surface. The method includes temporarily bonding a handle to the second major surface, removing a majority of the substrate to expose the first major surface and bonding a second substrate to the first major surface with deposited bonding material.

Direct bond method providing thermal expansion matched devices

A semiconductor structure having: a silicon structure; and a plurality of laterally spaced PiN diodes formed in the silicon structure; and a surface of the silicon structure configured to reduce reverse bias leakage current through the PiN diodes. In one embodiment, a gate electrode structures is disposed on a surface of the silicon structure, the gate electrode structure having portions disposed between adjacent pairs of the diodes, the gate structure being biased to prevent leakage current through the diodes.

PiN diode structure having surface charge suppression

Structures and methods of fabricating semiconductor wafer assemblies that encapsulate one or die in a cavity etched into an oxide bonded semiconductor wafer stack. The methods generally include the steps of positioning the die in the cavity, mechanically and electrically mounting the die to the wafer stack, and encapsulating the die within the cavity by bonding a lid wafer to the wafer stack in one of multiple ways. Semiconductor processing steps are applied to construct the assemblies (e.g., deposition, annealing, chemical and mechanical polishing, etching, etc.) and connecting the die (e.g., bump bonding, wire interconnecting, ultrasonic bonding, oxide bonding, etc.) according to the embodiments described above.

Die encapsulation in oxide bonded wafer stack

A foundry-agnostic post-processing method for a wafer is provided. The wafer includes an active surface, a substrate and an intermediate layer interposed between the active surface and the substrate. The method includes removing the wafer from an output yield of a wafer processing foundry, thinning the substrate to the intermediate layer or within microns of the intermediate layer to expose a new surface and bonding the new surface to an alternate material substrate which provides for enhanced device performance as compared to the substrate.

Foundry-agnostic post-processing method for a wafer

In one aspect, an active electronically scanned array (AESA) tile includes a radiator structure and oxide-bonded semiconductor wafers attached to the radiator structure and comprising a radio frequency (RF) manifold and a beam former. An RF signal path through the oxide-bonded wafers comprises a first portion that propagates toward the beam former and a second portion that propagates parallel to the beam former.

Tile for an active electronically scanned array (AESA)

Aspects and examples described herein provide a hybrid imaging sensor chip assembly for reducing undesired radiative transfer between a complementary metal-oxide semiconductor (CMOS) read-out integrated circuit (ROIC) and an optical detector, and methods of manufacturing a hybrid imaging sensor chip assembly. In one example, a hybrid imaging sensor chip assembly includes an optical detector configured to collect electromagnetic radiation incident thereon, a complementary metal-oxide semiconductor (CMOS) read-out integrated circuit (ROIC), and a radiation-shielding wafer interposed between the optical detector and the CMOS ROIC, the radiation-shielding wafer including a plurality of through wafer vias (TWVs) electrically coupled to the optical detector and the CMOS ROIC, the radiation-shielding wafer being positioned to prevent radiative transfer between the CMOS ROIC and the optical detector.

Hybrid sensor chip assembly and method for reducing radiative transfer between a detector and read-out integrated circuit

An electronic device integration method and integrated electronic device. The integration method may include the steps of preparing a first electronic device by forming an electrically conductive trace overlying a substrate, forming a barrier layer overlying the electrically conductive trace, forming one or more electrically conductive interconnects on the barrier layer, and forming a bonding layer overlying the trace and/or at least partially surrounding the one or more interconnects. The barrier layer is configured to prevent formation of an intermetallic compound between the trace and interconnect structures, while still enabling electrical communication between the trace and interconnect. The integration method may further include the steps of direct bonding the first electronic device to a second electronic device, direct bonding a third electronic device to the second electronic device, and so on. A high-temperature treatment and functional testing of the vertically integrated electronic device may be conducted after each stack sequence.

Barrier layer for interconnects in 3D integrated device

Pin diode structure having surface charge suppression

Growing community of inventors

Santa Barbara, CA, United States of America

John J Drab