International Business Machines Corporation

Globalfoundries Inc.

John J Bandy

Graham M Bates

Bradley M Mahan

Jeffery A Brigante

Tracy A Tong

Ralph W Stevens, Jr

An apparatus and methods for measuring the clamping force applied to a substrate by clamping elements of a substrate holder. The apparatus include a pneumatic cylinder, a two position, three way valve and a pressure gauge. In a first position of the valve, the gauge and a bore of the cylinder are vented or pre-pressurized. In a second position of the valve, the bore and gauge are isolated. The methods include placing the apparatus with the valve in the first position between clamping elements set to a non-clamping position, moving the valve to the second position, setting the clamping elements to a clamping position and reading a pressure on the gauge.

Substrate edge clamping force tester

A calibration gauge, an apparatus and a method for calibrating sensors that detect wafer protrusion from a wafer cassette using the calibration gauge. The calibration gauge includes a disk having a first region which is a circular sector of central angle Ahaving a constant radius Rabout a center and an integral second region of increasing radius about the center, the increasing radius increasing from Rto Rthrough a central angle A, wherein Ris greater than Rand A+Aequals 360&#xb0;.

Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette

A method and apparatus for removing a pad adhesively secured to a platen. The apparatus includes a barrel assembly having a clamp assembly fixedly attached to a perimeter of the barrel assembly; a rotatable handle assembly nested within the barrel assembly; and a ratchet assembly nested between the handle assemble and the barrel assembly the ratchet assembly configured to engage the rotatable handle assembly.

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Cambridge, VT, United States of America

John J Bandy