Knowles Electronics, Inc.

Ams Ag

John J Albers

Sung Bok Lee

Thomas Froehlich

Yenhao Chen

Jorge Grilo

Jeremy Hui

Brandon Harrington

Yaoyang Guo

Alyssa Kueffner

Jonathan Reeg

A microelectromechanical systems (MEMS) device includes a MEMS die and an electrical circuit electrically connected to the MEMS die. The electrical circuit includes a first capacitor that produces a first output signal based on a signal received from the MEMS die, and a second capacitor that produces a second output signal based on a signal received from the MEMS die. The electrical circuit is configured to determine a nominal capacitance of the MEMS die based on a ratio of the first output signal to the second output signal and a ratio of the capacitances of the first and second capacitors.

Microelectromechanical systems ('MEMS') device having a built-in self-test (“BIST”) and a method of application of a BIST to measure MEMS health

A sensor device includes a substrate, a microelectromechanical systems (MEMS) transducer disposed on the substrate, in integrated circuit, and a cover disposed on the substrate. The sensor device includes a port or an opening for allowing acoustic energy to be incident on the MEMS transducer. The sensor device further includes an ingress protection element positioned to cover the port, the ingress protection element comprising at least one non-planar portion.

Non-planar ingress protection element for a sensor device

A microphone assembly includes an acoustic transducer configured to generate an analog signal in response to pressure changes sensed by the acoustic transducer. The analog signal includes frequency components below a threshold frequency. The microphone assembly also includes an integrated circuit electrically coupled to the acoustic transducer and configured to determine a characteristic of frequency components below the threshold frequency, determine whether the characteristic of the frequency components corresponds to a fall event, and generate an output signal in response to a determination that the characteristic of the frequency components corresponds to the fall event. The microphone assembly also includes a housing having an external device interface with electrical contacts. The acoustic transducer and the integrated circuit are disposed within the housing. The integrated circuit is electrically coupled to contacts of the external device interface.

Microphone assembly with free fall detection

A microelectromechanical system (MEMS) motor includes a substrate, a backplate, and a diaphragm. The substrate has a first surface and a second surface. The second surface has a slot that extends at least partially into the substrate. A port extends through the substrate. The backplate is mounted to the first surface of the substrate, and the backplate covers at least a portion of the port. The diaphragm is between the backplate and the substrate. The diaphragm moves with respect to the backplate in response to acoustic energy that passes through the port.

Acoustic relief in MEMS

A micro electro mechanical system (MEMS) microphone includes a base including a port extending through the base, a shim assembly, an ingress protection element, and a MEMS device. The shim assembly is disposed on the base and over the port. The shim assembly has a plurality of walls that form a hollow interior cavity. The shim assembly also has a top surface and a bottom surface coupled to the base. The ingress protection element extends over and is coupled to the top of the shim assembly to enclose the cavity of the shim assembly. The shim assembly elevates the ingress protection element above the base and is effective to prevent the passage of contaminants there through. The MEMS device includes a diaphragm and a back plate and is disposed over the ingress protection element.

Elevated MEMS device in a microphone with ingress protection

An integrated circuit includes a first amplifier and a second amplifier. A first impedance matching circuit is coupled to the first amplifier, a first charge pump, and a single MEMS transducer. A second impedance matching circuit is coupled to the second amplifier, a second charge pump, and to the single MEMS transducer. A first capacitive load as measured at an input of first amplifier, and a second capacitive load as measured at an input of the second amplifier exist. The first capacitive load and the second capacitive load are balanced with respect to each other. A single pressure change causes the single MEMS transducer to create a first electrical signal and a second electrical signal. Both the first electrical signal and the second electrical signal are matched or approximately matched in magnitude, and 180 degrees or approximately 180 degrees out of phase with respect to each other.

Split signal differential MEMS microphone

A microphone assembly includes a capacitive MEMS transducer and a bias circuit having a DC output coupled to the transducer. The microphone assembly also includes a differential amplifier having a first input coupled to a first output of the transducer, the differential amplifier having a second input coupled to a second output of the transducer. The microphone assembly further includes a first impedance matching network and a second impedance matching network configured to balance a first capacitive load at the first input of the amplifier and a second capacitive load at the second input of the amplifier. Electrical signals applied by the transducer to the first and second inputs of the amplifier are matched or approximately matched in magnitude and 180 degrees or approximately 180 degrees out of phase with respect to each other.

A micro electro mechanical system (MEMS) apparatus includes a substrate. The substrate includes a first surface and a second surface. The first surface and the second surface are on opposing sides of the substrate. A programming contact pad is disposed on the second surface of the substrate. A MEMS device is disposed on the first surface of the substrate. An integrated circuit is disposed on the first surface of the substrate and electrically connected to the MEMS device and the contact pad. An anti-fuse region is coupled to the pad and to ground. When the anti-fuse region is not fused, a first electrical path exists from the programming contact pad to the integrated circuit. When the anti-fuse region is fused, a second electrical path is created from the programming contact pad to ground and the first electrical path is no longer available for programming purposes.

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Chicago, IL, United States of America

John J Albers