Air Products and Chemicals, Inc.

John Irven

Dao-Hong Zheng

Mark Allen George

Eugene Joseph Karwacki, Jr

Neil Alexander Downie

Suhas Narayan Ketkar

Benjamin James Arthur Inman

Timothy John Maykut

Ronald Martin Pearlstein

John Giles Langan

Naser Mahmud Chowdhury

Benjamin Lee Hertzler

Sukla Chandra

Lieve De Paepe

Alan J Paterson

Reiner Reinhard Taege

Peter Trevor Reading

Daniel C Tregear

Kenneth Coull

Jonathan Davey

Graham Alan Leggett

Andrew Peter Webb

Dao Hong Zheng

Lieve Anna De Paepe

A system for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising a storage vessel that houses an acetylene feed steam comprising acetylene and solvent; a cooling system that maintains the storage vessel and provides the acetylene feed stream at a temperature ranging from 20&#xb0; C. to &#x2212;50&#xb0; C.; and a purifier in fluid communication with the storage vessel wherein the acetylene feed stream is introduced into the purifier at a temperature ranging from &#x2212;50&#xb0; C. to 30&#xb0; C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

Process and system for providing acetylene

A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million ('ppm'), or 10 ppm, or 1 ppm, or 100 parts per billion ('ppb'), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20&#xb0; C. to &#x2212;50&#xb0; C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from &#x2212;50&#xb0; C. to 30&#xb0; C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

An apparatus for containing and delivering hazardous gases at sub-atmospheric pressure from a pressurized container is provided which includes a valve body in sealed communication with an outlet orifice of the pressurized container. The outlet orifice of the pressurized container is open to an interior chamber of the pressurized container. A fluid discharge path is located in the valve body, between the outlet orifice of the pressurized container and an outlet orifice of the valve body. A pressure regulator having a pressure sensing means capable of responding to sub-atomospheric pressure, is integral to the valve body, in-line in the fluid discharge path with the pressure regulator pre-set to a pressure below atmospheric pressure to allow the gas to be delivered through the regulator from the interior chamber only when the pressure regulator senses a downstream pressure at or below the pre-set pressure. Finally, a high pressure shut-off valve integral to the valve body and in-line in the fluid discharge path and upstream from the pressure regulator is included. The gas flows through from the interior chamber of the pressurized container through the fluid discharge path, through the outlet orifice of the pressurized container, and through the outlet orifice of the valve body only when the outlet orifice is connected to a vacuum system. A method of containing and delivering hazardous gases at sub-atmospheric pressure is also provided.

Sub-atmospheric gas delivery method and apparatus

A modular gas control device for use with a compressed gas cylinder ( ) comprises a primary module ( ) and a secondary module ( ) mounted on the primary module. The primary module comprises a first supporting body ( ) having a first main gas flow path ( ) through the body. The supporting body has input connecting means ( ) for mounting the body on the cylinder ( ) and connecting the gas flow path ( ) to communicate with the gas cylinder through a first flow path ( ). Pressure reducing means ( ) provides gas in the flow path at a lower pressure than in the container. Output connecting means ( ) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve ( ) is positioned upstream of the pressure reducing means, and filling means ( ) allows filling of the cylinder with compressed gas through the input connecting means ( ) along a second flow path ( ) separate from the input flow path ( ). The secondary module ( ) has a corresponding supporting body ( ) and main flow path ( ) and corresponding output connecting means ( ) and corresponding input connecting means ( ) for mounting the secondary module ( ) on the primary module ( ). The supporting body ( ) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.

Gas control device and method of supplying gas

Gas is admitted to an in-container purification unit via an inlet located at or near the gas discharge end of the unit. This feature is advantageous because it allows a liquefied gas container to be filled to a level above the second end of the body of the unit without the problem of dispensing liquefied gas.

Gas purification unit

Pressurized gas containers are refilled from a source of high pressure gas using a valve assembly that comprise a first and second gas flow control unit, the control units having a first valve and a second valve respectively, in which assembly further comprises actuators for cooperatively opening the valves when the control units are provided in compressed engagement, preferably using a lever action.

Valve assembly, apparatus and method of filing a pressurized gas container

A modular gas control device for use with a compressed gas cylinder ( ) comprises a primary module ( ) and a secondary module ( ) mounted on the primary module. The primary module comprises a first supporting body ( ) having a first main gas flow path ( ) through the body. The supporting body has input connecting means ( ) for mounting the body on the cylinder ( ) and connecting the gas flow path ( ) to communicate with the gas cylinder through a first flow. path ( ). Pressure reducing means ( ) provides gas in the flow path at a lower pressure than in the container. Output connecting means ( ) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut-off valve ( ) is positioned upstream of the pressure reducing means, and filling means ( ) allows filling of the cylinder with compressed gas through the input connecting means ( ) along a second flow path ( ) separate from the input flow path ( ). The secondary module ( ) has a corresponding supporting body ( ) and main flow path ( ) and corresponding output connecting means ( ) and corresponding input connecting means ( ) for mounting the secondary module ( ) on the primary module ( ). The supporting body ( ) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.

A modular gas control device for use with a compressed gas cylinder (,) comprises a primary module (,) and a secondary module (,) mounted on the primary module. The primary module comprises a first supporting body (,) having a first main gas flow path (,) through the body. The supporting body has input connecting means (,) for mounting the body on the cylinder (,) and connecting the gas flow path (,) to communicate with the gas cylinder through a first flow path (,). Pressure reducing means (,) provides gas in the flow path at a lower pressure than in the container. Output connecting means (,) downstream of the pressure reducing means provides a low pressure outlet from the main gas flow path. A high pressure shut off valve (,) is positioned upstream of the pressure reducing means, and filling means (,) allows filling of the cylinder with compressed gas through the input connecting means (,) along a second flow path (,) separate from the input flow path (,). The secondary module (,) has a corresponding supporting body (,) and main flow path (,) and corresponding output connecting means (,) and corresponding input connecting means (,) for mounting the secondary module (,) on the primary module (,). The supporting body (,) of the secondary module has a combination of two or more functional components comprising means for measuring and/or varying parameters of gas flow in the second supporting body, and/or for switching and/or venting and/or mixing gas flow in the second supporting body.

A control vent system is disclosed for reducing volatile impurities in a gaseous product of ultra-high purity delivered from a storage vessel containing an inventory of a non-cryogenic liquid product, as well as a method and a system for delivering the product from the storage vessel. The control vent system includes a vent line attached to the storage vessel and a condenser in the vent line. Coolant (e.g., a refrigerant) is transferred between the condenser and a source of coolant, such as a refrigeration unit. The method of reducing volatile impurities includes three steps. The first step is to vent part of the gaseous vapor from the gaseous vapor space to a condenser. The second step is to cool the vented gaseous vapor in the condenser to a temperature below the boiling point of the liquid product and above the boiling points of the volatile impurities. As a result, a first portion of the vented gaseous vapor is condensed and a second portion of the vented gaseous vapor is not condensed. The final step is to vent the second portion of the vented gaseous vapor from the condenser.

Control vent system for ultra-high purity delivery system for liquefied

An apparatus for supplying high purity gas comprises a cylinder having a valve with two internal ports. One internal port is used to fill the cylinder while the other is fitted with a unit which removes particulates and impurities from the gas as it leaves the cylinder. The unit comprises an inlet, a first filter for removing coarse particulates, layers of adsorbent and absorbent for removing impurities, and a second filter for removing fine particulates. The purified gas leaves the cylinder via the valve and after passing through a regulator, a flow control device and various lengths of tubing passes through a conventional purifier immediately upstream of the point of use. The apparatus reduces the load on the purifier and hence decreases the frequency at which the purifier has to be recharged. Potentially the apparatus could obviate the need for the purifier altogether.

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High Wycombe, United Kingdom

John Irven