Average Co-Inventor Count = 1.33
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Speedfam-ipec Corporation (1 from 151 patents)
2. Speedfam Corporation (1 from 49 patents)
2 patents:
1. 6113478 - Polishing apparatus with improved alignment of polishing plates
2. 5997390 - Polishing apparatus with improved alignment of polishing plates