Other

Western Atlas Inc.

Unova IP Corp.

John H Nolan

William A Nolan

Russell Westerman

David J Johnson

Jason Plumhoff

Hans Walter Herzog

Michael M Manuszak

Kenneth B Lingo

Larry Ryan

Kenneth Lingo

Kenneth E Lingo

The present invention provides a method for processing a photolithographic substrate, comprising the placement of the photolithographic substrate on a support member in a chamber wherein the photolithographic substrate has an initial temperature of about zero degrees Celsius to about fifty degrees Celsius. A heat transfer fluid is introduced into the chamber to cool the photolithographic substrate to a target temperature of less than about zero degrees Celsius to less than about minus forty degrees Celsius. The cooled photolithographic substrate is subjected to a plasma process before the temperature of the cooled photolithographic substrate reaches the initial temperature.

Temperature control method for photolithographic substrate

An endless accumulating conveyor with upper and lower runs and curved sections at the ends with a plurality of pallet trains each with at least two pallets releasably connected together by a latch at least while the pallet train is advanced over the upper run. The pallets are disconnected as each pallet is advanced around a curved section without being connected to any of the other pallets. The pallets may be held stationary and accumulated while the conveyor continues to run.

Accumulating conveyor with latchable pallets

An endless loop accumulating conveyor of the over/under type adapted to slidably support pallets and to frictionally transport them over both the upper and lower conveyor runs. The conveyor including a coupling to couple the pallet to the endless loop including a pin inserted into the endless loop to couple the pallet to the endless loop when the pallet is in the proximity of the curvilinear ends of the conveyor.

Accumulating conveyor

A roller assembly for use with a conveyor for transporting a workpiece wherein the drive force applied by the roller is adjustable independent of the force generated by placing a workpiece on the roller. The roller includes an inner sleeve secured to a drive shaft of the conveyor. A roller is disposed about the inner sleeve and is frictionally fit along an interface between the roller and an inner sleeve such that when a weight is placed upon the roller, the frictional force occurring between the interface between the roller and sleeve causes the rotating inner sleeve to impart motion to the roller thus moving the workpiece. The roller includes a connection to the inner sleeve such that the coupling or frictional force between the roller and the inner sleeve is independently variable of any force generated by placing a workpiece on the roller.

Conveyor apparatus for transporting a workpiece with a variable drive

An endless accumulating conveyor has upper and lower guide rails for supporting pallets. An endless roller chain has an upper run extending along the upper guide rails and a lower run extending along the lower guide rails. A dogging device on each pallet is engageable between the rollers of the chain to move the pallet with the chain along the upper and lower runs. A friction clutch for the dogging device of each pallet causes the dogging device to release and slip past the rollers of the chain when the pallet encounters a predetermined resistance to movement, as when it is desired to accumulate pallets. Mechanism is provided for positively propelling each pallet over the curved section at both ends of the conveyor from one run to the other without slipping.

Endless accumulating conveyor

A conveyor for transporting a workpiece from a first position to a second position along a curved path. The conveyor includes side members including a plurality of individual members arranged adjacent one another and allowing for such that individual members may move in a longitudinal direction relative to adjacent individual members to change the overall length of the side member. The side members are interconnected through use of slots and fasteners such that the slots in adjacent individual members are offset to allow for longitudinal adjustment between the adjacent members. Such adjustment results in an adjustable flexible conveyor enabling the conveyor to be adjustable in either direction along a particular curved path or configuration.

Conveyor for transporting a workpiece along a curved path

A variable speed drive mechanism for transferring a workpiece in an accelerated and decelerated motion comprising a pair of spaced carrier arms driven by a main shaft that rotates through a fixed stationary gear. A set of pulleys is mounted between the carrier arms and a flexible drive member drivingly connects the stationary gear and the pulleys. One of the set of pulleys drives a pair of bellcranks each of which is operatively connected to a transfer arm through a roller and cam slot arrangement. The connection between the bellcrank and the transfer arm provides a more desirable acceleration and deceleration movement of the transfer arms.

Variable speed drive mechanism with dwell

There is disclosed a reset mechanism particularly adapted for use within a magnet valve in which the reset mechanism comprises a passageway within the valve housing connecting the inlet and outlet passages in which a reset valve normally interrupts a communication between the inlet and outlet side of the said reset passage to permit normal operation of the magnetic valve and to permit normal fluid flow through the inlet and outlet passages thereof prior to movement of said magnetic valve from its normally open to its normally closed position. After said magnetic valve has closed, this being responsive to a pre-determined excess of fluid pressure across the primary communication area between the inlet and outlet passages of the magnetic valve, the reset valve can be actuated to open the reset passage thereby creating an equalization of pressure between the outlet and inlet ports, thus eliminating the existence of any relative vacuum across the area of primary communication between the inlet and outlet passages and, thereby, eliminating any opposition to the return of the magnetic valve to its normally open position.

Magnetic valve

There is disclosed a fluid control device including housing, a fluid flow passage therein, and a fluid outlet passage communicating with said fluid inlet passage. Within the housing is a reciprocating valve capable of permitting or precluding communication between the inlet and outlet passages, the valve constituting a ferromagnetic armature susceptible to receiving an electromagnetic induction of a magnetic axis along its axis of reciprocation, such a magnetic axis generally corresponding to the longitudinal center of a fluid-tight chamber within said housing within which the valve may reciprocate. The valve is provided with a flow-responsive first radial end face disposed within a region of communication between the inlet and outlet passages. A fluid control device also includes a magnetic stator wound about the housing in the region of the reciprocating valve when the valve is in its open position. The stator, upon receipt of a current, is capable of electromagnetic co-action with the armature valve to thereby reciprocate said valve selectively out of or into closure across the region of communication between the inlet and outlet passages. The closure or non-closure of the reciprocating valve is dependent upon the direction of current flow through the windings of the stator. Thusly, the electromagnetic co-action between the armature valve and the stator may be used to selectively override an otherwise 'open' or 'closed' position of the reciprocating valve across the region of fluid communication between the inlet and outlet passages.

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Harrison Township, MI, United States of America

John H Nolan