Industrial Technology Research Institute

John H Lau

Ra-Min Tain

Ming-Ji Dai

Ming-Che Hsieh

Heng-Chieh Chien

Yu-Lin Chao

Sheng-Tsai Wu

Chun-Kai Liu

Wei-Chung Lo

Wei Yu Li

Jui-Feng Hung

A thinned integrated circuit device and manufacturing process for the same are disclosed. The manufacturing process includes forming a through-silicon via (TSV) on a substrate, a first terminal of the TSV is exposed on a first surface of the substrate, disposing a bump on the first surface of the substrate to make the bump electrically connected with the TSV, disposing an integrated circuit chip (IC) on the bump so that a first side of the IC is connected to the bump, disposing a thermal interface material (TIM) layer on a second side of the IC opposite to the first side of the IC, attaching a heat-spreader cap on the IC by the TIM layer, and backgrinding a second surface of the substrate to expose the TSV to the second surface of the substrate while carrying the heat-spreader cap.

Thinned integrated circuit device and manufacturing process for the same

A fabricating method and a testing method of a semiconductor device and a mechanical integrity testing apparatus are provided. An object includes a wafer, an insulating layer, and a plurality of conductive posts is provided. A surface of the wafer has a plurality of first blind holes outside chip regions and a plurality of second blind holes inside the chip regions. The insulating layer is between the conductive posts and the walls of the first blind holes and between the conductive posts and the walls of the second blind holes. A mechanical integrity test is performed to test a binding strength between the insulating layer, the conductive posts, and the walls of the first blind holes. The conductive posts in the chip regions are electrically connected to an element after the conductive posts in the first blind holes are qualified in the mechanical integrity test.

Fabricating method of semiconductor device

A semiconductor device including a silicon substrate, a plurality of silicon nanowire clusters, a first circuit layer and a second circuit layer. The silicon substrate has a first surface, a second surface opposite to the first surface and a plurality of through holes. The silicon nanowire clusters are disposed in the through holes of the silicon substrate, respectively. The first circuit layer is disposed on the first surface and connected to the silicon nanowire clusters. The second circuit layer is disposed on the second surface and connected to the silicon nanowire clusters.

Semiconductor device

An electronic device packaging structure is provided. The semiconductor device includes a semiconductor base, an emitter, a collector, and a gate. The emitter and the gate are disposed on a first surface of the semiconductor base. The collector is disposed on a second surface of the semiconductor base. A first passivation layer is located on the first surface of the semiconductor base surrounding the gate. A first conductive pad is disposed on the first passivation layer. A second conductive pad is disposed on the collector on the second surface. At least one conductive through via structure penetrates the first passivation layer, the first and second surfaces of the semiconductor base, and the collector to electrically connect the first and second conductive pads.

Electronic device packaging structure

A chip stacking structure including a carrier, a first redistribution layer, a second redistribution layer, at least one first chip, at least one second chip, and at least one conductor is provided. The carrier has a first surface and a second surface opposite to each other. The carrier has at least one through hole. The first and second redistribution layers are disposed on the first and second surfaces of the carrier, respectively. The first and second chips are disposed on the first and second surfaces of the carrier and electrically connected with the first and second redistribution layers, respectively. The conductor is disposed on one of the first and second chips. The conductor is disposed in the through hole. The first and second chips are electrically connected by the conductor. A gap is formed between the conductor and an inner wall of the carrier which surrounds the through hole.

Chip stacking structure and fabricating method of the chip stacking structure

A measuring apparatus including a first chip, a first circuit layer, a first heater, a first stress sensor and a second circuit layer is provided. The first chip has a first through silicon via, a first surface and a second surface opposite to the first surface. The first circuit layer is disposed on the first surface. The first heater and the first stress sensor are disposed on the first surface and connected to the first circuit layer. The second circuit layer is disposed on the second surface.

Measuring apparatus that includes a chip having a through silicon via, a heater, and a stress sensor

By adding particles of high thermal conductivity and low thermal expansion coefficient into the copper as a composite material and filling with the composite material into the through-via hole, the mismatch of the coefficient of thermal expansion and the stress of the through-silicon via are lowered and the thermal conductivity of the through-silicon via is increased.

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Taipei, Taiwan

John H Lau