Tropel Corporation

Corning Incorporated

General Signal Corporation

Bell Telephone Laboratories

American Telephone & Telegraph Co., At&t Bell Laboratories

Other

American Telephone and Telegraph, Co.

Gca Corporation/tropel Division

John H Bruning

Keith Ernest Hanford

Alan D White

Douglass L Blanding

David R Shafer

Joshua Monroe Cobb

Mark Joseph Tronolone

Kevin John Magierski

James Edson Webb

Jack Weston Frankovich

James E Platten

Frank A DeWitt, Iii

Anthony R Phillips, Jr

Nicholas Francis Borrelli

Charlene Marie Smith

Karl William Koch, Iii

Alexander Mikhailovich Streltsov

Douglas Clippinger Allan

James Andrew West

Paul Francis Michaloski

Paul Gerard Dewa

Andrew W Kulawiec

Mark Christian Sanson

Chunsheng J Huang

Douglas S Goodman

Dirk Mueller

Vivek G Badami

Jon F Fleig

David R Beaulieu

Graham J Siddell

Keith E Hanford

An apparatus for obtaining radiant energy has first and second photovoltaic receivers. A primary curved reflective surface is disposed to reflect incident polychromatic radiation toward a first focal plane. A spectral separator is disposed between the first focal plane and the primary curved reflective surface. The spectral separator has a dichroic separating surface, convex with respect to the incident reflected polychromatic radiation and treated to reflect a first spectral band toward the first photovoltaic receiver and to transmit reflected polychromatic radiation outside the first spectral band. The spectral separator also has a curved separator reflective surface, convex with respect to the light transmitted through the dichroic separating surface and treated to reflect at least a portion of the light transmitted through the dichroic separating surface toward the second photovoltaic receiver.

Method and apparatus for concentrating light

A positioning apparatus for providing relative movement between a first member and a second member has a lever element pivotably coupled to the first member along a fulcrum member and has an actuator arm and a positioner arm. First and second flexure elements extend between the positioner arm of the lever element and the second member. An actuator is coupled to the actuator arm of the lever element.

Kinematic optical mount

An apparatus for obtaining energy from a polychromatic radiant energy source has a light concentrator for concentrating and redirecting incident radiant energy, having an optical axis, and a spectral separator disposed along the optical axis, apart from the light concentrator and in the path of concentrated, redirected radiant energy. The spectral separator has a first planar surface treated to reflect a first spectral band of light toward a first focal region and to transmit a second spectral band and a second planar surface spaced apart from the first planar surface and oblique with respect to the first planar surface. The second planar surface is treated to reflect the second spectral band back through the first planar surface and toward a second focal region spaced apart from the first focal region. First and second light receivers are disposed nearest each respective focal region for receiving the first and second spectral bands.

Apparatus for obtaining radiant energy

An optical element mount has an outer member and an inner member. The inner member has a central axis and is suspended within the outer member by a plurality of fold flexures. Each fold flexure has a fold that lies along a line that intersects the central axis at one common point, where the common point serves as a pivot point for rotational movement of the inner member.

Optical mount pivotable about a single point

A monolithic optical element mount has an inner member suspended within an outer member and movable with respect to the outer member along an axis. A first set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the first set has a fold that lies on a tangent to a first circle lying in a first plane that is orthogonal to the axis. A second set of fold flexures extends from the inner member to the outer member, so that each fold flexure in the second set has a fold that lies on a tangent to a second circle lying in a second plane that is parallel to the first plane. With respect to a view taken along the axis, the folds for the first set do not align with the folds for the second set.

Monolithic optical mount

The present invention provides methods of generating short wavelength radiation, methods of transporting short wavelength radiation, and apparati used in these methods. One embodiment of the invention provides a method of transporting short wavelength radiation using a photonic band gap fiber. Another embodiment of the invention provides a method of transporting short wavelength radiation using a bundle of photonic band gap fibers. Another embodiment of the invention provides a method of generating ultraviolet radiation using high harmonic generation by pumping a noble gas-filled photonic band gap fiber with a pulsed laser source.

Methods of generating and transporting short wavelength radiation and apparati used therein

Rotational motions between a displacement-measuring probe and an optical test surface define a spherical or near spherical datum surface against which measurements of the probe are taken. The probe has a measurement axis that is maintained substantially normal to the optical test surface during the course of measurement.

Measurement of form of spherical and near-spherical optical surfaces

A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.

Compensator for radially symmetric birefringence

Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.

Intrinsic birefringence compensation for below 200 nanometer wavelength optical lithography components with cubic crystalline structures

Toric surfaces are mounted on a transparent support plate and measured at grazing incidence using a pair of leading and following diffractive optics for diffracting a test beam with respect to a reference beam. The leading diffractive optic diffracts rays of the test beam through various diffraction angles so that after passing through the transparent support plate, the rays strike the toric surface at a constant grazing angle. The following diffractive optic further diffracts the rays of the test beam through other diffraction angles into realignment with the reference beam.

Interferometric method of measuring toric surfaces at grazing incidence

A reduction photolithographic scanning system uses a reduction lens with a circular image field that is shaped to an irregular hexagonal configuration affording different effective scanning widths so that the full area of a microcircuit image can be scanned onto a substrate in an integer number of overlapping scans. This minimizes the number of scans required for each image area and maximizes the total image area that can be scanned per time unit.

Raster-scan photolithographic reduction system

An interferometer (10) employs diffractive optics (30 and 40) for measuring errors in test surfaces (14) that differ from planes and spheres. A beam of light (28) having a planar shape is separated into two portions (32 and 34). One of the diffractive optics (30) can be used to reshape the second portion (34) of a beam of light (28) into a non-planar shape along a path of grazing incidence to the test surface (14), and the other diffractive optic (40) can be used to further reshape the second portion (34) back into a planar shape in common with the first portion (32) of the beam of light (28). The two planar beam portions (32 and 34) are recombined to produce an interference pattern (44) representing the errors in the test surface (14).

Interferometric measurement of surfaces with diffractive optics and

Interferometric measurement of toric surfaces at grazing incidence

Compound diffractive optics are used in an interferometer for simultaneously measuring multiple surfaces, making multiple measurements of individual surfaces, conveying test beams multiple times, and aligning pairs of the diffractive optics with each other. Typically, the compound optics have multiple diffraction zones that reshape test beams for reflecting from test surfaces or for combining with reference beams. The multiple diffraction zones can also exhibit different optical qualities such as transmission and reflection for conveying the test beams to and from the test surfaces.

Interferometer with compound optics for measuring cylindrical objects at

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Pittsford, NY, United States of America

John H Bruning