Inficon Gmbh

John Gordon Wiley

Shawn M Briglin

Michael F Vollero

Mario Weder

A photoionization sensor assembly includes a housing defining a chamber with a first end and an opposing second end and being permeable to the analyte gas and non-analyte gases. A radiation source is structured to emit photons into the chamber. A first, second and third electrode are positioned in the chamber. The photons ionize the analyte gas, are insufficient to ionize the non-analyte gases, and causing ejection of photoelectrons from the third electrode. A controller is structured to receive a measurement of a total pressure and electrically bias the electrodes to collect the photoelectrons on the first and second electrodes in a ratio dependent on the total pressure. The controller is structured to determine the ratio of photoelectrons that are collected on the first and second electrodes at the total pressure and determine an amount of electrical current due to ionization by correcting the measured current using the determined ratio.

Partial pressure gauge assembly for process contaminant detection using photoionization and associated method

A plasma generation device for generating a plasma comprises a support having a first side and an opposing second side. The support is comprised of a ceramic matrix and a split-ring conductor is embedded in the ceramic matrix. A hermetically sealed via extends from the split-ring conductor to the second side of the support and connects to an electrical supply. A ground plane is formed on the second side of the support. A plasma is generated proximate to the first side of the support, and the support seals to a wall of the chamber such that the first side is exposed to the one or more gases inside the chamber and the second side is isolated from the plasma and the one or more gases inside of the chamber.

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Marietta, NY, United States of America

John Gordon Wiley