Lam Research Corporation

Beam Express Inc

John Gerard Dewit

Oliver David Jones

Jignesh H Shah

David T Frost

Ashok A Parmar

A system and method for placing an electro-optical assembly inside a panel. In accordance with various embodiments of the invention, the system includes a housing to house the electro-optical assembly. The housing comprises a top section, a bottom section, a front element, an attachment module, and a metallic plate. A latching unlatching mechanism facilitates removal of the hosing from the panel. The electro-optical assembly provides EMI shielding.

Housing for high-speed electro-optical assembly incorporating latching and EMI shielding

A self-aligning mandrel assembly is provided. The assembly includes a cylindrical inner core and a fulcrum disposed on an outer surface of the cylindrical inner core. A mandrel shell surrounds the cylindrical inner core. The mandrel shell has a wafer preparation material affixed to an outer surface thereof, and the mandrel shell is pivotably supported by the fulcrum such that the mandrel shell aligns with a surface of a substrate when the wafer preparation material contacts the surface of the substrate.

Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same

An apparatus for preparing a semiconductor wafer is provided. The apparatus includes a wafer drive assembly having a pair of wafer drive rollers for rotating a semiconductor wafer in a vertical orientation. The wafer drive assembly is configured such that the wafer drive rollers are controllably movable from a first position to a second position. Also provided as part of the apparatus is a pair of wafer preparation assemblies movably disposed in an opposing relationship above the wafer drive assembly. Each of the wafer preparation assemblies has a first wafer preparation member and a second wafer preparation member. The wafer preparation assemblies being movable into a first position in which each of the first wafer preparation members is position to perform a first wafer preparation operation on the wafer and into a second position in which each of the second wafer preparation members is positioned to perform a second wafer preparation operation on the wafer.

Wafer preparation apparatus including variable height wafer drive assembly

An apparatus for preparing a semiconductor wafer is provided. The apparatus includes a pair of drive rollers disposed so as to support a semiconductor wafer in a substantially vertical orientation. Each of the drive rollers is configured to be coupled to a drive belt for rotating the drive rollers. The apparatus further includes a pair of wafer preparation assemblies that is movably disposed in an opposing relationship. Each of the wafer preparation assemblies have a first wafer preparation member and a second wafer preparation member. The wafer preparation assemblies being movable into a first position in which each of the first wafer preparation members is positioned to perform a first wafer preparation operation on the wafer and into a second position in which each of the second wafer preparation members is positioned to perform a second wafer preparation operation on the wafer.

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Scotts Valley, CA, United States of America

John Gerard Dewit