Intel Corporation

John F Richards

Anand S Murthy

Glenn A Glass

Srijit Mukherjee

Dan S Lavric

Suresh Vishwanath

Jitendra Kumar Jha

Thomas T Troeger

Approaches for fabricating an integrated circuit structure including a titanium silicide material, and the resulting structures, are described. In an example, an integrated circuit structure includes a semiconductor fin above a substrate, a gate electrode over the top and adjacent to the sidewalls of a portion of the semiconductor fin. A titanium silicide material is in direct contact with each of first and second epitaxial semiconductor source or drain structures at first and second sides of the gate electrode. The titanium silicide material is conformal with and hermetically sealing a non-flat topography of each of the first and second epitaxial semiconductor source or drain structures. The titanium silicide material has a total atomic composition including 95% or greater stoichiometric TiSi.

Integrated circuit structures including a titanium silicide material

Growing community of inventors

Portland, OR, United States of America

John F Richards