Corning Incorporated

John Edward Maxon

Kenneth Edward Hrdina

Michael Henry Wasilewski

Brent R Mclean

William Robert Angell, Iv

Dana Craig Bookbinder

Pushkar Tandon

Richard Michael Fiacco

Daniel Raymond Sempolinski

Carlos Alberto Duran

Sezhian Annamalai

Robert Stephen Pavlik, Jr

Brian Lee Harper

William Rogers Rosch

Raymond D Groh

Christine E Heckle

Jeffrey L Sunderland

Kimberly Ann Wilbert

Daniel Joseph Bleaking

Nicolas Leblond

William R Iv Angell

A process for producing a glass body, the process including flowing oxygen gas from a burner in a furnace at a flow rate of greater than 12.0 standard liters per minute and flowing a precursor gas mixture from the burner. The process further including oxidizing the precursor gas mixture with the oxygen gas to form glass particles and depositing the glass particles on a collection cup to form the glass body.

Methods of forming silica-titania glass articles with reduced striae dimensions

A glass article for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions:[TiO]=(()), and[SiO]=(100&#x2212;{()}&#x2212;&#x3b4;())wherein [TiO] is the concentration of titania in wt. %, [SiO] is the concentration of silica in wt. %, c is the titania concentration in wt. % for a predetermined zero crossover temperature (T), f(x, y, z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x, y, z) with respect to c, and &#x3b4;(x, y, z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x, y, z).

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A method for forming a silica glass blank includes generating soot using an array of soot producing burners, directing the soot along a first direction onto a bait, collecting the soot on the bait, imparting relative oscillatory motion having a repeat period between the array of soot producing burners and the bait along a second direction orthogonal to the first direction while collecting the soot, and offsetting the relative oscillatory motion by a selected distance along the second direction after each repeat period.

Method for forming fused silica glass using multiple burners

Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.

High refractive index homogeneity fused silica glass and method of making same

Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

Reduced striae extreme ultra violet elements

Reduced striae extreme ultraviolet elements

These glass bodies are light weight porous structures such as a boules of high purity fused silica (HPFS). More specifically, the porous structures are supports for HPFS mirror blanks. Porous glass is made utilizing flame deposition of pure silica or doped silica in a manner similar to the production of high purity fused silica. Bubbles or seeds are formed in the glass during laydown. Finely divided silicon carbide (SiC) particles are used to form the bubbles. At least one layer of porous glass is formed in the boule.

Light weight porous structure

Fused silica articles exhibiting improved internal transmission and decreased absorption change when irradiated with a laser when compared with fused silica articles containing lower levels of aluminum. The articles also exhibit induced transmission when irradiated with a laser. The articles also exhibit improved off-axis refractive index homogeneity.

Fused silica having improved index homogeneity

A method of producing, by flame hydrolysis, a fused silica glass containing titania which comprises delivering a mixture of a silica precursor and a titania precursor in vapor form to a flame, passing the vapor mixture through the flame to form SiO.sub.2 --TiO.sub.2 particles, and depositing the particles within a furnace where they melt to form a solid glass body.

Fused SiO.sub.2 -TiO.sub.2 glass method

Fused silica boules (19) having improved homogeneity are produced by causing the boule (19) to flow radially during its formation to achieve local mixing between portions of the boule which may have experienced different laydown conditions. The mixing is achieved by one or a combination of: (1) use of a containment vessel (13) having a gently sloping containment wall (22); (2) use of a containment vessel (13) whose inner radius (r.sub.v) is substantially larger than the outermost radius (r.sub.b) of the burners (14) used to produce the boule (19); and/or (3) maintaining the boule (19) at a sufficiently high temperature during laydown so that radial flow is achieved with a minimum head height of glass. Large blanks having high homogeneity can be made from such boules, e.g., blanks having diameters above 200 millimeters and .DELTA.n values of less than 0.25.times.10.sup.-6.

Method and containment vessel for producing fused silica glass and the

Oscillation/rotation patterns for improving the off-axis homogeneity of fused silica boules are provided. The patterns reduce the optical effects of periodic off-axis striae by decreasing the ratio of .DELTA.n.sub.striae to .DELTA.z.sub.striae, where .DELTA.n.sub.striae is the average peak-to-valley magnitude of the striae and .DELTA.z.sub.striae is their average peak-to-peak period. The oscillation/rotation patterns have long repeat periods and cause soot-producing burners to trace out substantially spiral-shaped patterns on the surface of the boule.

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Canton, NY, United States of America

John Edward Maxon