Eni Technology, Inc.

John E Sortor

Leonid E Reyzelman

One configuration of the present invention is a radio frequency transformer board that has a planar dielectric substrate having a first surface, an opposite second surface, and a transformer. The transformer includes a first elongate conductor disposed on the first surface and having a first end and a second end, a second elongate conductor disposed on the second surface and having a first end and a second end. The first end of the first conductor and the second end of the second conductor are disposed proximate an edge of the substrate and spaced apart from one another along the edge. The second end of the first conductor and the first end of the second conductor are electrically shorted to one another proximate the edge of the substrate.

Printed circuit board transformer

A radio frequency (RF) generator apparatus for a plasma processing system that is resistant to nonlinear load mismatch conditions is provided. The apparatus includes an RF oscillator configured to generate an RF signal, an RF amplifier responsive to the RF signal to produce a VHF RF signal having sufficient power to drive a plasma chamber load, and a VHF-band circulator coupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.

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Norristown, PA, United States of America

John E Sortor