Entegris, Inc.

Other

John E Sergi

William M Goodwin

Oleg P Kishkovich

Devon A Kinkead

Anatoly Grayfer

John C Gaudreau

Jürgen Michael Lobert

Mark C Phelps

Frank Vincent Belanger

Thomas Lamoly

Frank M Limoli

William Goodwin

The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.

System and method for removing contaminants

The present invention relates to a system and method for sampling a gas flow to measure one or more contaminants within a semiconductor processing tool. The system includes a portable unit containing one or more dry traps, Tenax traps and, if desired, wet impingers. The unit is coupled to a gas flow in a clean room and the dry traps. Tenax traps and wet impingers measure contaminants contained in the gas supply for a determined sampling interval. When the sampling interval is done, the unit is sent to an analysis facility for processing.

Systems and methods for detecting contaminants

A device and method that simplifies marine maintenance for inboard motorboats. The device and method allows an individual to safely flush the engine of a motorboat while the boat is out of the water by simulating the fluid circulation conditions of a boat in the water. More specifically, the device and method eliminates the danger of damaging the boat's engine on account of excessive fluid flow through the engine by utilizing the boat's coolant pump propulsion system to pull precise amounts of fluid through the system at appropriate flow rates and pressure levels.

Marine inboard winterizing circulating system

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Franklin, MA, United States of America

John E Sergi