Other

Entegris, Inc.

Advanced Technology Materials, Inc.

Foresight Processing, LLC

John E Q Hughes

Steven M Lurcott

Donald D Ware

Peter Wrschka

Thomas H Baum

Peng Zou

Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

Fluid processing systems and methods

Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner-based containers adapted for pressure dispensation.

Systems and methods for delivery of fluid-containing process material combinations

A surface finishing device includes a surface finishing drum having opposing ends and a chamber therebetween, an elongate fixture having a handled proximal extremity and an opposing distal extremity, and a support element, which is carried by the distal extremity and extends through one of the ends of the surface finishing drum into the chamber. An electric motor is disposed in the chamber and is carried by the support element. A drive shaft is also disposed in the chamber and couples the motor to the other of the ends of the surface finishing drum.

Powder driven surface finishing apparatus

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Phoenix, AZ, United States of America

John E Q Hughes