Ovonic Synthetic Materials Company Inc.

Energy Conversion Devices, Inc.

Veeco Instruments Inc.

Pioneer Metals and Technology, Inc.

Inland Steel Company

Rhk Technology, Inc.

John E Keem

Stanford R Ovshinsky

James D Flasck

Jun S Im

Mark Krivoruchko

Vsevolod Zelenkov

Daniel E Siegfried

David Matthew Burtner

James L Wood

Keith L Hart

Valery Alexeyev

Scott A Townsend

Gerald F Marshall

Alan M Kadin

Richard C Bergeron

Steven A Flessa

Lennard Sztaba

Richard Blacker

Vincent D Cannella

Zvi Yaniv

Clive E Catchpole

Louis D Swartz

Erwin Eichen

Hellmut Fritzsche

Russell C Custer

Adam J Kollin

Robert F Krause

John T Tyler

Juei-Teng Chen

Steffen Porthun

Nicola J Grupido

John E Tyler

R William McCallum

Bruce Kramer

Julius J Harwood

Richard W Seguin

David Hoeft

Kevin Dennis

Richard Bergeron

Valery V Alekseev

Su Cronogue

Hossein Sadate-Akhavi

A computer-implemented method, system, and computer readable medium for configuring programmable equipment having hardware devices that can be programmatically interconnected into different hardware configurations. A graphical user interface is provided on a computer display which permits a user to iconically define both a hardware and procedural configuration of the available hardware devices. Configuration data is generated that can be used to automatically configure the programmable equipment according to the user-defined hardware and procedural configuration.

Programmable equipment configuration method and apparatus

Shielding associated with an ion source, such as an anode layer source, reduces the amount and/or concentration of sputtered contaminants impinging and remaining on the surface of a target substrate. While passing the ion beam through to the target substrate, shielding can reduce the total amount of sputtered contaminants impinging the substrate before, during, and/or after passage of the substrate through the envelope of the etching beam. Particularly, a shield configuration that blocks the contaminants from impinging the substrate after the substrate passes through the etching beam (i.e., outside of the envelope of the etching beam) yields a higher quality substrate with reduced substrate contamination.

Sputtered contamination shielding for an ion source

Magnetic materials having a coercivity not less than about 1000 Oersted are prepared in a single step procedure. A molten mixture of a desired composition having a relatively high boron content is cooled at a rate slower than about 10degrees Celsius per second. Preferably, the molten mixture is cooled by depositing it on a chilled surface such that it forms a layer between about 120 and about 300, and preferably between about 120 and about 150, microns thick.

Magnetic material

An ion source design and manufacturing techniques allows longitudinal cathode expansion along the length of the anode layer source (ALS). Cathode covers are used to secure the cathode plates to the source body assembly of an ion source. The cathode covers allow the cathode plate to expand along the longitudinal axis of the ion source, thereby relieving the stress introduced by differential thermal expansion. In addition, the cathode cover configuration allows for less expensive cathode plates, including modular cathode plates. Such plates can be adjusted relative to the cathode-cathode gap to prolong the life of a given cathode plate and maintain source performance requirements. A cathode plate in a linear section of an ion source has symmetrical edges and can, therefore, be flipped over to exchange the first (worn) cathode edge with the second (unworn) cathode edge.

Longitudinal cathode expansion in an ion source

A modular ion source design relies on relatively short modular anode layer source (ALS) components, which can be coupled together to form a longer ALS. For long ion sources, these shorter modular components allow for easier manufacturing and further result in a final assembly having better precision (e.g., a uniform gap dimensions along the longitudinal axis of the ion source). Modular components may be designed to have common characteristics so as to allow use of these components in ion sources of varying sizes. A modular gas distribution system uniformly distributes a working gas to the ionization region of the module ion source. For each gas distribution module, gas distribution channels and baffles are laid out relative to the module joints to prevent gas leakage. Furthermore, gas manifolds and supply channels are used to bridge module joints while uniformly distributing the working gas to the ALS.

Modular uniform gas distribution system in an ion source

A closed loop exit hole is formed in a magnetically permeable end wall () of an enclosure () of a closed electron drift ion source. Parts of this end wall separated by the exit hole serve as pole pieces (and) of the magnetic system and define the first pole gap. The magnetic system includes pole pieces (and), which define the second pole gap made in the form of a closed loop exit hole and arranged along the direction of ion emission. Magnetomotive force sources (and) are located in space between two groups of magnetic terminals. The ratio of width of each pole gap and distance between pole pieces of the first (and) and second (and) magnetic gaps along the direction of ion emission is not less than 0.05. The invention allows the intensity of the generated ion beam and the energy of ions to be increased, and this is provided by the homogeneous distribution of ion current density across the ion beam section.

Ion sources

Magnetic materials having a coercivity not less than about 1000 Oersted are prepared in a single step procedure. A molten mixture of a desired composition having a relatively high boron content is cooled at a rate slower than about 105 degrees Celsius per second. Preferably, the molten mixture is cooled by depositing it on a chilled surface such that it forms a layer between about 120 and about 300, and preferably between about 120 and about 150, microns thick.

A permanent magnet material having the formula, in atomic %:

Non-uniaxial permanent magnet material

A composite, multilayer thin film solid lubricant structure having multiple thin film layers of solid lubricant interleaved by thin film interlayers which interrupt propagation of growth defects in the deposition process.

Multilayer solid lubricant composite structures and method of making same

Disclosed is a method for forming a high magnetic parameter ferromagnetic material. The material has a distribution of magnetic parameters as solidified, and is separated into a first fraction having relatively high magnetic parameters and a second fraction having relatively low magnetic parameters. The method comprises applying a magnetic field to the materials, the magnetic field being high enough to magnetize the low magnetic parameter fraction, but low enough to avoid substantially magnetization of the high parameter fraction. Thereafter the fractions of material are magnetically separated.

Method of manufacturing, concentrating, and separating enhanced magnetic

Disclosed is a controlled pressure melt spinning method of rapidly solidifying alloys to obtain a solid alloy of controlled mean crystallite size, narrow crystallite distribution, and a fine grain microstructure.

Method of forming alloy particulates having controlled submicron

Disclosed is a method for separating initially non-magnetized ferromagnetic material. The material has a distribution of magnetic parameters, and is separated into a first fraction having relatively high magnetic parameters and a second fraction having relatively low magnetic parameters. The method comprises applying a magnetic field to the materials, the magnetic field being high enough to magnetize the low magnetic parameter fraction, but low enough to avoid substantial magnetization of the high parameter fraction. Thereafter the fractions of material are magnetically separated.

X-ray dispersive and reflective structures and materials are provided which exhibit at least one third of the theoretical integral reflection coefficient for the structures in the range of interest without fluorescence or absorption edges. The materials can be thermally activated to control the desired properties, during or post deposition. The structures can be deposited by ion beam absorption techniques to form the structures in a precise manner. The index of the refraction of the structures can be continuously varying throughout the structures.

X-ray dispersive and reflective structures

A method of forming a magnetic material. The magnetic material is a solid mass of grains, and has magnetic parameters characterized by: (1) a maximum magnetic energy product, (BH).sub.max, greater than 15 megagaussoersteds; and (2) a remanence greater than 9 kilogauss. The magnetic material is prepared by a two step solidification, heat treatment process. The solidification process is carried out by: (a) providing a molten precursor alloy; (b) atomizing the molten alloy through nozzle means to form individual droplets of the molten alloy; and (c) quenching the droplets of the molten alloy to form solid particles of the alloy. The solid particles have a morphology characterized as being one or more of (i) amorphous; (ii) microcrystalline; or (iii) polycrystalline. The grains within the solid have, at this stage of the process, an average grain characteristic dimension less than that of the heat treated magnetic material. In the second, or heat treating, stage of the process, the atomized solid particles are heat treated to form a solid material comprised or grains meeting at grain boundaries. The grains and grain boundaries have the morphology of the magnetic material.

Method of preparing a magnetic material

Multilayer protective coatings that are applied over a substrate that comprise a plurality of superimposed multilayer units and methods of making the coatings are disclosed. Each multilayer unit contains two or more superimposed thin layers in which at least two layers are compositionally different. The properties of the resulting coating are a combination of the properties of the individual layers. One layer of a multilayer unit may provide hardness or wear resistance and another layer may provide lubricity, for example. The thickness of the individual layers can be related to the microscopic surface relief of the substrate to which the protective coating is applied. One disclosed multilayer unit comprises three layers: an oxidation resistant layer; a nitride layer; and a layer of disordered boron and carbon material. A method of making the multilayer coatings is provided that includes depositing over a substrate a plurality of superimposed multilayer units. The deposition may be accomplished by sputtering, for example.

Method of producing multilayer coatings on a substrate

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Bloomfield Hills, MI, United States of America

John E Keem