Tegam, Inc.

Bird Technologies Group, Inc.

Bird Electronic Corporation

John D Swank

Jefferson Dean Lexa

Andrew S Brush

A dual-coplanar sensor architecture is constructed by launching from coaxial airline to a unique arrangement of coplanar waveguides, arranged symmetrically on both sides of a thin dielectric substrate. The center conductor of the coaxial airline makes electrical contact with the middle conductor of both the top and bottom coplanar waveguides. The characteristic impedance of the top and bottom coplanar waveguides is designed to be approximately twice the characteristic impedance of the coaxial airline, such that the parallel combination of the two coplanar waveguides is the characteristic impedance of the coaxial airline. Further, steps in both the ground planes and center conductor at the point of transition from coaxial to coplanar are used to tune the launch and minimize reflection at the launch.

Coaxial to dual co-planar waveguide launcher for microwave bolometry

A co-axial microwave bolometer architecture is disclosed that uses thick-film processes to construct very small thermistors on a substrate that is selected for low heat transfer. Thermal isolation is further enhanced by making the planar electrodes from a metal with lower heat transfer than typical electrical metals. Furthermore, a resistor with very strong temperature coefficient (thermistor), is arranged such that connecting metal paths are arranged axially, and as generally flat, thin, planar conductors. Additionally, the substrate of the thermistor is selected to have very low conductivity of heat, so the thermistor element itself is well isolated thermally from its surroundings.

Planar-axial thermistor for bolometry

A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe () is connected to an RF transmission line for receiving and measuring voltage () and current signals () from the transmission line (). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.

System and method for analyzing power flow in semiconductor plasma generation systems

An antenna tester has a signal generator that produces a test signal applied to the antenna and a reference signal; the test signal and reference signals having a shared noise modulated characteristic; a circuit for detecting a reflected test signal from the antenna in response to the test signal; and a demodulator circuit for demodulating the reflected test signal and reference signal based on the noise characteristic to produce first and second output signals; the first and second output signals having detectable characteristics related to the antenna impedance characteristics.

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Hudson, OH, United States of America

John D Swank