Honeywell International Inc.

John D Mize

Len Hom

Ronald H Fleming

Robert Prater

Russell B Gore

David K Chan

Gilbert Amador

Kenneth I Niemela

Peter J Kang

The invention includes coil constructions configured for utilization in PVD chambers, and also includes methods of forming coil constructions suitable for utilization in PVD chambers. The coil constructions can include one or more cup projections extending from an outer periphery of a coil body. The cup projections are one-piece with the coil body, and have a recess extending therein with a projecting lip extending entirely around the recess. The cup projections further comprise a fastener receiver within the recess configured to receive a fastener for connecting the coil with the chamber. The methods of forming the coil construction can include identifying separate components of an assembly associated with a coil replacement kit, and forming a one-piece construction which can be substituted for at least two of the components.

Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions

The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.

Single piece coil support assemblies, coil constructions and methods of assembling coil constructions

The invention encompasses a method of generating information about materials in a composition. A reagent is utilized to dissolve portions of the composition, and thereafter is filtered through a substrate which is then scanned with a microscope using automated displacement of the substrate to obtain data about the non-dissolved portions at locations along a grid pattern. Information about the size and quantity of the non-dissolved portions of the composition is generated. The invention also encompasses a method of generating information about impurities present in a metal composition. Metallic portions of the composition are selectively dissolved relative to impurities to form a solution. The solution is filtered through a substrate which is then scanned with a microscope to obtain data about a darkness of the impurities relative to a background. The data is processed to generate information about the size, quantity and type of the impurities.

Methods of generating information about materials present in compositions and about particulates present in fluids utilizing a microscope

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Spokane Valley, WA, United States of America

John D Mize