Iolon, Inc.

Seagate Technology Incorporated

John D Grade

John H Jerman

Joseph D Drake

Kurt Edward Petersen

John F Heanue

Jill D Berger

Kathy J Jackson

Kevin Y Yasumura

Albert L Tervalon

A balanced microdevice comprising a substrate, a movable structure overlying the substrate, an element and a lever assembly having a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the movable structure and an opposite second extremity coupled to the element. The movable structure causes the lever to pivot about the pivot so as to move the element in a direction of travel. The element is substantially mechanically balanced to inhibit undesirable movement of the element in the direction of travel in response to externally applied forces.

Balanced microdevice

A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.

Miniature device with bossed suspension member

A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.

Rotary electrostatic microactuator

A tunable laser comprising a laser source for providing light with a wavelength along an optical path. A diffractive element is positioned in the optical path and spaced from the laser source for redirecting the light received from the laser source. A reflective element is positioned in the optical path and spaced from the diffractive element for receiving the light redirected by the diffractive element and for further redirecting the light back along the optical path to the reflective element. The diffractive element receives the light further redirected by the reflective element and returns the light along the optical path to the laser source. The optical path created by the laser source, the diffractive element and the reflective element causes the light to lase at the wavelength. At least one microactuator is coupled to one of the diffractive element and the reflective element for moving such element to select the wavelength of the light. A variety of microactuators that can be used with the tunable laser are provided.

Tunable laser with microactuator

An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

Optical microswitch

A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.

Damped micromechanical device

The present invention provides a miniature device that comprises a grounded layer, an insulative layer overlying the grounded layer and a conductive layer overlying the insulative layer wherein the insulative spacing between the conductive and grounded layers is increased so as to inhibit electrical shorting between the conductive layer and grounded layers. A method of making miniature devices is also provided.

Miniature device with increased insulative spacing and method for making same

A miniature device comprising a substrate and primary and secondary movable members overlying the substrate. First and second suspension members couple the secondary movable member to the substrate. Third and fourth suspension members couple the primary movable member to the secondary movable member. A lever assembly is provided and has a pivot and a lever coupled to and pivotable about the pivot. The lever has a first extremity coupled to the primary movable member and an opposite second extremity. The secondary movable member is coupled to the lever between the first extremity and the pivot.

Miniature device with translatable member

A rotary electrostatic microactuator that includes a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. First and second spaced-apart springs and a plurality of comb drive assemblies are included. Each of the comb drive assemblies has a first comb drive member mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers. Each of the first and second springs has a first end portion secured to the substrate and a second end portion secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.

Micromechanical device

An apparatus for finely adjusting an optical component is described. The apparatus may include an optic component, a substrate, and an adjuster. The adjuster may include a platform coupled to the optic component, and a linkage of notched springs coupled to both the platform and the substrate. The linkage of notched springs provides for motion of the platform relative to the substrate along primarily one axis. The apparatus may be used in a data storage system to adjust the position of the optic component in order to focus light propagated through the optic component.

Apparatus for finely adjusting optical components

A micromachined device of micron dimensions comprising a base and a movable member spaced apart from the base. The movable member has first and second end portions and an axis extending between the first and second end portions. First and second torsional members extend along the axis and are connected to the respective first and second end portions for permitting the movable member to rock between first and second positions about the axis relative to the base. The first and second torsional members are secured to the base. At least a portion of the movable member is of a conductive material. First and second spaced-apart electrodes are carried by the base for driving the movable member between the first and second positions. A tether member extends transversely of the axis and is secured to the first torsional member and to the base whereby the tether member regulates the rocking of the movable member.

Micromachined device with stretchable restoring force member

An apparatus is provided for holding micron-sized objects, such as optical components, along with a method for making such an apparatus. The apparatus includes a mounting block having openings, such as cavities and recesses, for holding the micron-sized objects therein. The mounting block further includes one or more resilient members having a base mounted on the mounting block. The resilient members further include an engaging surface configured to engage a micro-machined object within a cavity or recess of the mounting block. When the object is engaged, the resilient member applies pressure to the object to secure it against a surface of the mounting block or against another resilient member. The object is held within the opening of the mounting block and can be moved within the opening to allow proper placement and subsequent adjustment of the object.

Apparatus for holding and engaging micro-machined objects and method for making same

Balanced microdevice and rotary electrostatic microactuator use therewith

An electrostatic microactuator comprising a substrate and at least one comb drive assembly having a first comb member mounted on the substrate and a second comb member overlying the substrate. The first comb member has a plurality of first comb fingers. The second comb member has a plurality of second comb fingers. The second comb member is movable between a first position in which each second comb finger is not substantially fully interdigitated with an adjacent pair of first comb fingers and a second position in which each such second comb finger is substantially fully interdigitated with such adjacent pair of first comb fingers. Each of the second comb fingers is offset relative to the midpoint between the adjacent pair of first comb fingers when in the first position and is substantially centered on such midpoint when in the second position.

Electrostatic microactuator with offset and/or inclined comb drive fingers

A tiltable electrostatic microactuator comprising a substantially planar substrate and a rotatable member overlying the substrate for rotation about an axis of rotation extending perpendicular to the planar substrate. A plurality of comb drive assemblies are provided and each has a first comb drive member mounted on the substrate and a second comb drive member coupled to the rotatable member. Each of the first and second comb drive members is provided with comb drive fingers. First and second spaced-apart springs are included in the microactuator and each has a first end portion coupled to the substrate and a second end portion coupled to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated. A controller is electrically coupled to the second comb drive members and the substrate for tilting the rotatable member relative to the substrate about a pivot axis extending parallel to the planar substrate. A method for using the microactuator is provided.

Growing community of inventors

Mountain View, CA, United States of America

John D Grade