1. Kla Tencor Corporation (11 from 1,787 patents)

2. Kla Corporation (6 from 528 patents)

3. Kla-tencor Technologies Corporation (5 from 641 patents)

4. University of Texas System (1 from 5,444 patents)

1. 12422376 - Imaging reflectometry for inline screening

2. 12332182 - System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data

3. 11798827 - Systems and methods for semiconductor adaptive testing using inline defect part average testing

4. 11624775 - Systems and methods for semiconductor defect-guided burn-in and system level tests

5. 11614480 - System and method for Z-PAT defect-guided statistical outlier detection of semiconductor reliability failures

6. 11293970 - Advanced in-line part average testing

7. 10649447 - Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

8. 10466596 - System and method for field-by-field overlay process control using measured and estimated field parameters

9. 10409171 - Overlay control with non-zero offset prediction

10. 9903711 - Feed forward of metrology data in a metrology system

11. 9651943 - Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers

12. 9620426 - Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation

13. 9116442 - Feedforward/feedback litho process control of stress and overlay

14. 8948495 - Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a wafer

15. 8804137 - Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability