Agilent Technologies, Inc.

John Calhoun

George Galica

Ronald J Forni

James Pierce

Vannie (Yucong) Lu

Ronald Boudreau

Vannie Yucong Lu

Kevin Flynn

Romeo Boris Filip

Robert Langellotti

A modular pump platform includes a pump head module, a pump motor module, an electronics module and a separable tray. The pump motor module includes a pump motor having a rotary output removably coupled to a crank shaft of the pump head, the pump motor being one of multiple types of pump motors, and the pump motor module being detachably connected to the pump head module. The electronics module includes an electronic control circuit configured to control operation of the pump motor, the electronic control circuit being one of multiple types of electronic control circuits corresponding to the types of pump motors. Each of the pump head module, the pump motor module and the electronics module is detachably connected to the separable tray. At least the pump motor module is interchangeable with another pump motor module comprising a pump motor of another type.

Modular pump platform

Parts of a pump head of a scroll pump facilitate an assembly process in which the stationary and orbiting scroll blades of the pump are angularly aligned or synchronized with one another. A metallic bellows of the pump head provides a primary means of synchronizing the stationary and orbiting scroll blades. The assembly process may be carried out using a fixture configured to be mountable to an assemblage including the bellows and the orbiting plate scroll. The fixture has a reference feature, and the orbiting plate scroll or the frame has another reference feature that can be aligned with the reference feature of the fixture, in the circumferential direction of the bellows, during the course of the assembly process.

Angular synchronization of stationary and orbiting plate scroll blades in a scroll pump using a metallic bellows

A rough vacuum pump system includes a primary vacuum pump and a secondary vacuum pump. The primary vacuum pump is an oil-free positive displacement pump, and has an inlet opening, an outlet opening, a compression stage between the inlet and outlet openings, and an intermediate gas passageway that connects to a gas flow path running through the compression stage. The secondary vacuum pump is connected to the intermediate gas passageway of the primary vacuum pump. The compression ratio of the primary and secondary vacuum pumps operating in combination is greater than that of the compression ratio of either of the primary and secondary vacuum pumps operating individually. A vacuum apparatus includes a tracer gas detector connected to an inlet of the primary vacuum pump.

Vacuum pump system with light gas pumping and leak detection apparatus comprising the same

A scroll pump has a tip seal between an axial end of the scroll blade of one of stationary and orbiting plate scrolls of the pump and the plate of the other of the stationary plate and orbiting plate scrolls. The scroll pump may have a ballast gas supply system and use the operation of the ballast gas supply system to assess the condition of the tip seal. Alternatively, the scroll pump may have two pressure sensors that sense pressure at two locations spaced along a compression mechanism of the pump to assess the condition of the tip seal.

Scroll vacuum pump and method of maintenance including replacing a tip seal of a scroll vacuum pump

A vacuum scroll pump has a frame, a stationary plate scroll fixed to the frame, an orbiting plate scroll, an eccentric drive mechanism for driving the orbiting plate scroll, and counterbalancing features by which axial loads produced on the eccentric drive mechanism are offset. Scroll blades of the stationary and orbiting plate scrolls are nested to define pockets which constitute a compression stage between opposing front sides of plates of the stationary and orbiting plate scrolls. The counterbalancing features include an axial counterbalancing chamber defined at a back side of the plate of the orbiting plate scroll, i.e., opposite the side at which the compression stage is provided, and a mechanism by which an intermediate one of the pockets can be placed in communication with the counterbalancing chamber through the plate of the orbiting plate scroll.

Vacuum scroll pump having pressure-balanced orbiting plate scroll

A scroll pump isolates vibrations of a pump head/motor assembly of the pump from the exterior of the pump and thus, suppresses the production of airborne noise. The pump includes a sound-muffling enclosure surrounding the pump head/motor assembly, feet supporting the enclosure, and elastic vibration isolators. The pump head/motor assembly is fixed to the tops of the vibration isolators, and the sound-muffling enclosure is fixed to the vibration isolators at the bottoms of the isolators. The scroll pump also has a locking system by which motion of the pump head/motor assembly relative to the sound-muffling enclosure can be limited or prevented, and by which the sound-muffling enclosure can be hard-mounted to a support surface independently of the feet.

Vibration/noise management in a scroll compressor

A scroll pump facilitates the installation of a new tip seal between an axial end of the scroll blade of one of inner stationary and orbiting plate scrolls of the pump and the plate of the other of the inner stationary plate and orbiting plate scrolls. To this end, the orbiting plate scroll has a central portion and an outer peripheral portion extending around and seated on the central portion. The outer peripheral portion of the orbiting plate scroll is keyed to and/or fastened to the central portion such that the outer peripheral portion is not rotatable relative to the central portion and yet is axially removable from the central portion. The tip seal can be readily accessed and replaced by removing the outer peripheral portion of the orbiting scroll plate from the central portion.

Scroll pump having separable orbiting plate scroll and method of replacing tip seal

Scroll pumping apparatus includes a first scroll element and a second scroll element; a drive mechanism operatively coupled to the second scroll element for producing orbiting motion of the second scroll element relative to the first scroll element, the drive mechanism having an axis of rotation; and an isolation element to isolate a first volume and a second volume in the scroll pumping apparatus. The isolation element includes a first resilient annular member coupled, directly or indirectly, to the first scroll element, a second resilient annular member coupled, directly or indirectly, to the second scroll element, and a tubular member coupled between the first and second annular members.

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Lexington, MA, United States of America

John Calhoun