J. C. Schumacher Co.

Other

John C Schumacher

Andre Lagendijk

This invention is directed to a method and apparatus of delaying the reaction between a first reactive gas and a second reactive gas as the first reactive gas flows into the second reactive gas. The method comprises the steps of surrounding the first reactive gas with a non-reactive gas to form an insulated first reactive gas; and flowing the insulated first reactive gas into the second reactive gas. A sweep gas is used to impart momentum to the insulated first reactive gas. The apparatus comprises three coaxial tubular members which are used to introduce the first reaction gas, the non-reactive gas, and the sweep gas. The apparatus may be installed in a semiconductor device fabrication process either just upstream of the house exhaust line or upstream of an ODC or air pollution abatement device.

Method and apparatus for preventing reactive vapor backstreaming and backstreaming induced deposition

An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from electrodepositing doped silicon or germanium films on metallic sheet substrates. The energy released from such electrodeposition can then be used to regenerate the anode material used in the electrodepositing position.

Energy efficient process for continuous production of thin semiconductor

The gas inlet tube and the outlet tube in the upper end of a 'bubbler' container are each sealed with an easily breakable wall adjacent the wall where the tubes join the container. A second seal is formed on the outer ends of the tubes creating a compartment in which may be positioned a small hammer. The outer seals are sufficient to meet safety regulations regarding the shipment of highly corrosive or poisonous materials. The user of the material, breaks the outer seals, positions the hammer if not already in place, makes the desired connections to the tubes, applies a purging gas to the upper ends of the tubes, and breaks the inner seals by magnetically or otherwise actuating the hammer resting on the inner seal, thereby connecting the material to the desired system without exposing the material to the atmosphere.

Method of shipping and using semiconductor liquid source materials

An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from depositing doped silicon or germanium films on metallic sheet substrates. The energy released from such deposition can then be used to regenerate the anode material used in the deposition.

A bubbler system utilizing interconnected dual-chambers forming a series path for a carrier gas thereby rendering useful in excess of 90 percent of the material contained therein. The inlet and outlet ports of the bubbler system are provided with an inner and outer seal, creating a compartment in which may be positioned a small hammer. The user of the system removes the outer seals, makes desired connections to the ports, and thereby connects the bubbler to a using system without exposing the material to the atmosphere.

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Oceanside, CA, United States of America

John C Schumacher