Asm America, Inc.

Speedfam-Ipec Corporation

John C Ptak

John Andrew Adams

Robert A Eaton

A reactor chamber is positioned between a top array of LED heat lamps and a bottom array of LED heat lamps. The LED heat lamps forming the top and bottom arrays are individually or controllable in groups such that power output along each array of LED heat lamps can dynamically differ. The LED lamps can be controlled in response to, for example, feedback from chamber sensors, a desired temperature profile, and a failed LED lamp. In this way, the methods and systems described herein can dynamically compensate for operational characteristics of the reactor chamber. In one configuration, the LED heat lamps are arranged in a rectangular pattern. In some configurations, the LED heat lamps are arranged in a circular or a concentric pattern.

LED heat lamp arrays for CVD heating

An apparatus for optical endpoint detection of a chemical mechanical polishing process, that reduces or eliminates interference effects caused by air bubbles in chemical polishing slurries, and accumulation of polishing debris on components of the optical system. In particular, the invention provides hydrophobic light pipes and windows with polishing surfaces substantially coplanar with surrounding surfaces of polishing pads to thereby eliminate the effect of air bubbles trapped in recesses at the polishing pad surface. Moreover, hydrophobic surfaces have now been found to resist the accumulation of polished debris thereon, resulting in a reduction in loss of optical reflectance over polishing time. Accordingly, the invention provides an optical endpoint system that eliminates or reduces both the oversaturation and loss of reflectance problems of the prior art.

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Phoenix, AZ, United States of America

John C Ptak