University of South Florida

John Bumgarner

Andres M Cardenas-Valencia

Larry C Langebrake

Jay Dlutowski

Melynda C Calves

Weidong Wang

Lawrence C Langebrake

Michelle Cardenas

Carl J Biver

The present invention is directed to the fabrication of thin aluminum anode batteries using a highly reproducible process that enables high volume manufacturing of the galvanic cells. A thin aluminum anode galvanic cell having a meshed structure is provided which includes a catalytic metal layer positioned on a patterned silicon substrate, an etched dielectric layer positioned to cover the catalytic metal layer, the catalytic metal layer serving as an etch stop for the etched dielectric layer and an etched aluminum layer positioned to cover the dielectric layer, the dielectric layer serving as an etch stop for the etched aluminum layer.

Electrode mesh galvanic cells

An IR imaging system comprising microelectromechanical systems (MEMS) differential capacitive infrared sensors within a sensor array formed on a monolithic integrated circuit substrate, or flip chip bonded onto a signal processing chip fabricated separately, to include, a bimaterial deflectable element anchored to the substrate, a surface electrode fabricated on a top surface of the substrate and positioned below the deflectable element, the surface electrode and the deflectable element separated by a gap to form a first variable capacitor, a sealing ring surrounding the deflectable element and the surface electrode, an infrared transparent sealing cap electrode coupled to the sealing ring to form a vacuum cavity around the deflectable element and the surface electrode, the deflectable element and the sealing cap electrode separated by a gap to form a second variable capacitor and a micro-lens fabricated on the sealing cap electrode to focus the infrared radiation onto the bimaterial deflectable element.

Differential capacitive readout system and method for infrared imaging

The present invention is directed to the fabrication of thin aluminum anode batteries using a highly reproducible process that enables high volume manufacturing of the galvanic cells. A method of fabricating a thin aluminum anode galvanic cell is provided, the method including, depositing a layer of catalytic metal on a surface of a first substrate, depositing and patterning a benzocyclobutene layer to form a reservoir having four sidewalls of benzocyclobutene on the surface of the catalytic layer, depositing a layer of aluminum on a surface of a second substrate and bonding the first substrate to the second substrate to form a galvanic cell bounded by the catalytic metal layer and the aluminum layer and separated by the reservoir walls of benzocyclobutene, the second substrate positioned in overlying relation to contact the four sidewalls of the reservoir with the aluminum layer facing the catalytic layer.

Method for the fabrication of electrolyte cavities using surface micromachining

The present invention is directed to the fabrication of thin aluminum anode batteries using a highly reproducible process that enables high volume manufacturing of the galvanic cells. A method of fabricating a thin aluminum anode galvanic cell is provided, the method comprising, forming a recess in the silicon wafer, the recess having no more than three sidewalls, depositing a catalytic metal layer on a bottom surface of the recess, positioning a double-side sticky tape layer having a bottom side positioned to contact the no more than three sidewalls of the recess and positioning an aluminum foil layer to contact a top side of the double-side sticky tape layer and in overlying relation to the recess, thereby forming the galvanic cell.

Method for the fabrication of electrolyte cavities using bulk micro-machining

The present invention is directed to the fabrication of thin aluminum anode batteries using a highly reproducible process that enables high volume manufacturing of the galvanic cells. In the present invention, semiconductor fabrication methods are used to fabricate aluminum galvanic cells, wherein a catalytic material to be used as the cathode is deposited on a substrate and an insulating spacing material is deposited on the cathode and patterned using photolithography. The spacing material can either be used as a sacrificial layer to expose the electrodes or serve as a support for one of the electrodes. Similarly, the aluminum anode may be deposited and patterned on another substrate and bonded to the first substrate, or can be deposited directly on the insulating material prior to patterning. The cell is packaged and connected to a delivery system to provide delivery of the electrolyte when activation of the cell is desired.

Surface micromachined electrolyte-cavities for use in micro-aluminum galvanic cells

In accordance with an embodiment of the present invention, a thermally induced single-use valve is provided including a silicon wafer having a top surface and a bottom surface and at least one cavity formed in the bottom surface of the wafer, a thermally deformable membrane suspended across the cavity on the top surface of the wafer and at least one resistive element patterned on top of the thermally deformable membrane.

Thermally induced single-use valves and method of use

Halogenated organic compounds that are inexpensive and are readily available have been used to present the examples of the invention. These chemicals, when in contact with water experience a reaction that releases oxy-halogenated acid. These compounds are weak acids and release hydrogen ions according to their ionization constant keeping a constant level of oxy-halogenated ion. These ions are capable of reacting with catalytic cathodes and can be coupled with anode materials to fabricate galvanic cells. Exemplary embodiments of the present invention include cells with flat and cylindrical form factors having a variety of anodes.

Growing community of inventors

Anniston, AL, United States of America

John Bumgarner