Watlow Electric Manufacturing Company

Marvellworld Trade Ltd.

John Bergen

Daryl G James

Raghu R Kondapalli

William Bohlinger

James P Hentges

Kurt W Peterson

Larry Walters

Stanton Hopkins-Breitlow

Jason Houzenga

Gil Ramos

Jacob Robert Lindley

Philip Steven Schmidt

Jeremy J Quandt

Miranda Pizzella

James Hentges

Daniel Gander

Daryl James

Hanwen Yuan

Kurt Peterson

A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.

Systems and methods for using intermediate data to improve system control and diagnostics

Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.

Fiber optic probe with dual sealing and compression element

An assembly, for example an electrostatic chuck assembly, includes a first member, a second member disposed proximate the first member, a bond layer disposed between the first member and the second member, and at least one optical sensor disposed proximate the bond layer to detect a temperature of the bond layer in a field of view of the at least one optical sensor. The bond layer includes a phosphorescent material and provides a dual function of bonding the second member to the first member and emitting phosphorescent radiation towards the at least one optical sensor. In one form, the first member is an electrostatic chuck member and the second member is a heating plate. The assembly may further include a cooling plate and an additional bond layer disposed between the heating plate and the cooling plate.

Bonded assembly with integrated temperature sensing in bond layer

An assembly, for example an electrostatic chuck, is provided including a substrate, an electrostatic chuck, a heating plate, and a bond layer comprising a phosphorescent material. In one form, an optical sensor is disposed proximate the bond layer to detect a temperature of the bond layer in the field of view of the optical sensor. The phosphorescent material is illuminated and the subsequent decay is observed by the optical sensor. From this information, the temperature of the electrostatic chuck and substrate is determined and heating elements may be adjusted by a controller.

A process controller is provided and includes at least one optical sensor. The optical sensor includes an optical source is configured to emit an electronic signal toward an object. The process controller further includes a control unit in communication with the at least one optical sensor, wherein the control unit controls a controlled device based on the electronic signal received by the at least one optical sensor. In another form, the optical sensor further includes an optical detector configured to receive the return electronic signal reflected by the object. A system for process control in an elevated radio frequency (RF) environment is also provided and includes a process controller having at least one optical sensor and a control unit in communication with the optical sensor. The optical sensor is disposed within the elevated RF environment and includes an optical detector.

Process controller with an integrated optical detector

The present disclosure relates generally to a process controller and more specifically to a process controller with integrated optical sensing.

Process controller with integrated optical sensing

A network apparatus including a central processing unit, first physical layer devices, a second physical layer device, and a network switch. The network switch includes first ports communicating with the first physical layer devices; a second port communicating with the second physical layer device; and third and fourth ports communicating with the central processing unit over first and second media independent interfaces, respectively. The network switch includes a switch core module configured to route data packets between connected ports, including the first and third ports. The network switch includes a bypass switch configured to (i) in response to a first mode being selected, directly connect the second port and the fourth port, bypassing the switch core module, and (ii) in response to a second mode being selected, disconnect the second port from the fourth port and connect the second and fourth ports to the switch core module.

Method and apparatus for flexible interface bypass options in switches

A network switching module includes first ports to send and receive packets, and second ports each configured to send and receive packets using a respectively different interface. A mode switch designates a selected port of the second ports in response to an interface control signal. A bypass switch, in response to a bypass mode being activated, connects an additional port to the selected port. A switch core module, in response to the bypass mode not being activated, routes the packets among the first ports, the selected port, and the additional port. A multiplexer, in response to the bypass mode not being activated, connects the additional port and the selected port to the switch core module. The switch core module, in response to the bypass mode being activated, routes the packets only among the first ports.

Growing community of inventors

San Jose, CA, United States of America

John Bergen