First Solar, Inc.

John Barden

Rick C Powell

Arnold Allenic

Zhigang Ban

Benjamin Milliron

Gang Xiong

Feng Liao

Xilin Peng

Kenneth Ring

Aaron Roggelin

Nirav Vora

Yaojun Xu

Jerry Drennan

Litian Liu

Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

Systems and methods for vaporization and vapor distribution

An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers couple to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizer provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

Vapor transport deposition method and system for material co-deposition

An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers coupled to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizers provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.

A multi-stage method and apparatus for vaporizing and depositing a tellurium containing semiconductor material on a substrate.

Method and apparatus providing multi-step deposition of thin film layer

A method and system for controlling the amount of a second material incorporated into a first material by controlling the amount of a third material which can interact with the second material.

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Ottawa Hills, OH, United States of America

John Barden