Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tegal Corporation (2 from 95 patents)
2 patents:
1. 6406925 - Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
2. 6346428 - Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing