Robert Boschgmbh

Johannes Voigt

Kurt Burger

Thomas Weber

Susanne Lucas

Johannes Rauschnabel

Stefan Grosse

Jeanne Forget

Wolfgang Leutsch

Wolfgang Reuter

A method is proposed for vacuum-coating a substrate using a plasma-CVD method. In order to control ion bombardment during the vacuum coating, a substrate voltage, produced independently from a coating plasma, is applied to the substrate. The substrate voltage is modified during the coating. The substrate voltage is a direct voltage that is pulsed in bipolar fashion with a frequency of 0.1 kHz to 10 MHz. A wear-resistant and friction-reducing multilayer structure of alternating hard material individual layers and carbon or silicon individual layers is proposed.

Method and device for vacuum-coating a substrate

A method is for producing a functional coating, e.g., composite layers or metal alloys, on a substrate using at least one plasma jet source able to be operated in a fine vacuum up to an almost atmospheric pressure range. For this purpose, the plasma jet source produces a plasma, which emerges from the plasma jet source in the form of a plasma jet and acts on a substrate. In this context, at least two precursor materials, which are modified or fused in the plasma jet and subsequently deposited on the substrate, are introduced into the plasma.

Method for producing composite layers using a plasma jet source

Device for producing a plasma, in particular for treating surfaces, for chemically reacting gases, or for producing light, by way of microstructure electrode discharges, using a device for producing plasma having at least one guide structure. A microwave generator which can be used to launch microwaves into the guide structure. The guide structure has a locally narrowly limited plasma region in contact with a gas. The guide structure is preferably a metallic waveguide filled with a dielectric material, or an arrangement of strip lines which run on a dielectric plate. The device and the method are particularly suited for processing or activating surfaces or for depositing layers on a substrate.

Device and method for generating a local by micro-structure electrode dis-charges with microwaves

A method for applying wear protection layers including the steps of depositing a wear protection matrix with the aid of a PECVD method, and incorporating optically functional inclusions in the form of particles or intermediate layers with the aid of a PVD process. The chemistry of the inclusion is influenced by the process gas of the PECVD deposition and/or the matrix layer. In an example embodiment of the present invention, the optical functionality consists in UV protection of plastics by dispersion, absorption, or reflection of the UV component of the light.

Method for applying a wear protection layer system having optical properties onto surfaces

A method is proposed for vacuum-coating a substrate using a plasma-CVD method. In order to control ion bombardment during the vacuum coating, a substrate voltage produced independently from a coating plasma is applied to the substrate. The substrate voltage is modified during the coating. The substrate voltage is a direct voltage that is pulsed in bipolar fashion with a frequency of 0.1 kHz to 10 MHz. A wear-resistant and friction-reducing multilayer structure of alternating hard material individual layers and carbon or silicon individual layers is proposed.

A combination wear protection film for components made of substrates susceptible to wear is described. The film has a wear-resistant surface film that contains one or more of the elements carbon, nitrogen, or boron, the proportion of this element&mdash;or, if more than one of these elements is present, the sum of the proportions of the elements present&mdash;is at least 30% by atomic weight, preferably at least 40% by atomic weight; and a support film, located between a substrate and the surface film and made of a plasma polymer, that exhibits a quasi-continuous transition in modulus of elasticity and optionally in hardness from a value of a base film to a value of the surface film. A method for producing a wear protection film of this kind, and objects equipped with the wear protection film is also described.

Combination antiabrasion layer

In the process for coating the elastomeric rubber wiper a vaporous coating material is generated and activated by a plasma and/or laser; a protective coating is formed on a rubber wiper surface by exposing it to the vaporous coating material by CVD and/or PVD methods and process parameters for the coating process are controlled so that the protective coating includes at least three coating layers and has a total thickness of from 200 nm to 2 &mgr;m. The coating layers include at least one thicker softer elastic coating layer with elastomeric properties similar to those of the rubber wiper and other thinner harder coating layers having wear-resistant properties. The other thinner harder coating layers have respective hardness increasing from an inner most one to an outermost one of the other thinner harder coating layers.

Method for coating a rubber wiper blade

A device for vacuum coating bulk material includes a rotating holder for accommodating the bulk material, a plasma coating source arranged within the rotating holder, as well as a device, arranged within the rotating holder, for cleaning the bulk material using plasma. During the coating process, the rotational speed of the rotating holder is less than the speed necessary for producing a centrifugal force for fixing the bulk material against the inner wall of the rotating holder. The plasma coating source and the plasma cleaning device are arranged in such a way that their spheres of action overlap.

Device for vacuum coating bulk material

Described is a method for coating surfaces using a facility having sputtering electrodes, which has at least two electrodes that are spaced apart from one another and arranged inside a process chamber, and an inlet for a process gas. The two sputtering electrodes are acted upon by a bipolarly pulsed voltage in such a way that they are alternately operated as cathodes and as anodes. In addition, the frequency of the voltage is set between 1 kHz and 1 MHz. Furthermore, and that the operating parameters are selected in such a way that in operation, the electrodes are at least partially covered by a coating material.

Growing community of inventors

Leonberg, Germany

Johannes Voigt