Invensense, Inc.

Sensirion Ag

Johannes Schumm

Chung-Hsien Lin

Tsung Lin Tang

Rene Hummel

Stefan Thiele

Wang Shen Su

Andreas Reinhard

Thomas Kraehenbuehl

Chia Min Lin

Markus Graf

Dominik Niederberger

Pascal Gerner

Chia Ming Lin

A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.

Pressure sensor

A pressure sensor comprises a deformable membrane deflecting in response to pressure applied, a first stationary electrode, and a second electrode coupled to the deformable membrane, for determining a change in a capacitance between the first and the second electrode in response to the pressure applied. At least one of the first and the second electrode comprises a getter material for collecting gas molecules.

A mobile phone comprises a casing and a cavity in the casing. A humidity sensor is arranged for measuring a humidity in the cavity. In response to a trigger, a control unit analyzes a humidity signal supplied by the humidity sensor. A result of the analysis is presented via an output unit. Such device allows for measuring a humidity of a user's skin in case the user covers a window in the casing connected to the cavity by a body part.

Mobile phone with humidity sensor

Growing community of inventors

Zurich, Switzerland

Johannes Schumm