Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Sram Deutschland Gmbh

Carl-zeiss-stiftung

Mannesmann Sachs Ag

Johannes Rau

Armin Schoeppach

Bernhard Geuppert

Martin Mahlmann

Jens Kugler

Bernhard Gellrich

Thomas Petasch

Gerhard Fuerter

Hubert Holderer

Ulrich Weber

Juergen Fischer

Wolfgang Hummel

Ulrich Bingel

Markus Arbeiter

Gerd Klose

Gennady Fedosenko

Stefan Wiesner

Frank Schmidt

Leonid Gorkhover

Claudia Ekstein

Bernhard Johanni

Michael Widmann

Hans-Joachim Trefz

Guenter Albrecht

Josef Distl

Gerhard Fürter

Egon Sch&auml;flein

Thomas Huber

Armin SCHÖPPACH

An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.

Optical projection system

An optical projection system for a microlithography system includes a light path, a first lens unit receiving a first part of the light path, a second lens unit receiving a second part of the light path, and a support unit supporting the first and second lens units. The first and second lens units are elongated lens units including a plurality of lenses. The support unit includes a housing receiving a third part of the light path and enclosing a reflective element. The housing includes first and second interfaces. The first interface is a first support interface supporting the first lens unit. The second interface is a second support interface supporting the second lens unit at a location substantially opposite to the first interface.

A method and a device for the material-fit connection of an optical element to a frame are disclosed.

Method and device for connecting an optical element to a frame

An optical element has at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.

Optical element

An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis.

An optical element unit including an optical element and an optical element holder is disclosed. The optical element holder includes a holding element and coupling elements. The holding element holds the optical element and is made of a ceramic material. The elastic coupling elements are attached to the holding element and contact the optical element. The elastic coupling elements provide deformation decoupling between the holding element and the optical element.

Optical element unit

The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.

Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly

A flange assembly of an optical system has a first flange, a compensation element and a second flange. The flanges and the compensation element are substantially axially symmetric both flanges (') being suitable for being connected to other components of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges consist of different materials with different coefficients of linear thermal expansion. The compensation element is radially soft, but connects the two flanges rigidly in their relative spatial position.

Flange assembly of an optical system

An objective () with at least one optical element (), which is mounted in an inner ring (). The inner ring () is connected to an outer mount (). A manipulator () is provided for displacing the optical element () in at least a direction perpendicular to an optical axis. The inner ring () is connected to the outer mount () by means of at least two adjusting joints () with manipulators () and at least one swivel joint (). The at least two adjusting joints () and the at least one swivel joint () are provided with joint arms () extending at least approximately in a tangential direction with respect to the inner ring (), by means of which arms the inner ring () is elastically connected to the outer mount (). The ends of the joint arms () are articulated on the inner ring () in such a way that temperature-induced changes in length of the joint arms () are converted into a uniform turning direction of the inner ring () with respect to the outer mount () about the center of the optical element.

Objective with at least one optical element

The invention relates to a securing arrangement for a mount of an optical element, in particular in a lens systems for semi-conductor lithography, on a component. The mount is mounted, via three bearing bodies, in corresponding bearing locations of the component in each case. The mount and the component are held together via magnetic forces. The magnetic flux in the component ( ) is obstructed in the region of the bearing locations ( ) by a section ( ) of relatively low permeability and can be short-circuited via the bearing bodies ( ), made of magnetically highly permeable material, upon connection of the mount ( ) and component ( ) by at least one magnet.

Arrangement for securing a mount of an optical element

An adjusting optical element mount ( ) serves for the position of two components ( ) in relation to one another, in particular of two carrier elements for optical elements, such as mirrors or lenses, in particular as an axial and/or angle manipulator for lithography lenses. The components ( ) can be adjusted in relation to one another via the action of force (F, T). Each of the components ( ) has at least three hinges ( ). Each of the hinges ( ) of one component ( ) is connected in each case to a corresponding hinge ( ) of the respectively other component ( ) to form a pair of hinges ( ) via a lever element ( , 6 ) in each case. Each of the pairs of hinges ( ) is connected in each case to at least one lever ( ) of at least one of the adjacent pairs of hinges ( ) via the at least one lever ( )and at least one further hinge ( &prime;) in each case.

Optical element mount comprising an optical element holding frame

Disclosed is a brake device for at least one axle of a wheel of a vehicle such as a bicycle for braking a brake drum which is connected to the wheel, having a brake carrier, a shoe element, a brake lever with a cam which is arranged between two shoe ends of the shoe element and is preloaded in that area. The shoe element is connected to the brake carrier by a holder and the cam is connected to the brake lever without a bearing, by means of which it can be pivoted. The brake device according to the present invention has the advantage that it can be produced mechanically in large numbers in a simple manner, its characteristics can be influenced by design measures, and it has a high level of efficiency, so that reduced actuating forces result and possibly simplified actuating elements may be used.

Brake device

A device for shifting bicycle gears. The device includes a housing part and a rotary element. The housing part has a circumferential surface and a plurality of notches formed in the circumferential surface. Each of the plurality of notches corresponds to a gear-shifting position. The rotary element has a circumferential wall and is selectively rotatable relative to the housing part, the housing part being disposed concentrically within the circumferential wall of the rotary element. The device further includes a detent spring configured as a wrap spring and arranged circumferentially around the housing part, the wrap spring having a wrap diameter and a wrap angle of between approximately 180.degree. and 360.degree..

Device for shifting bicycle gears

A gear-change switch, particularly a stepping switch for controlling gears on bicycles or similar vehicles, has a fixed housing and an actuating element rotatably mounted for rotation in the clockwise and counterclockwise directions to tension or release a traction cable for controlling the bicycle gears. The actuation element comprises a thumb-operated gear-change switch or a twist-grip gear-change switch. The advantage of the switching device lies in the considerable simplification of the design and in the production of the components in plastic material.

Growing community of inventors

Gerstetten, Germany

Johannes Rau