Icos Vision Systems Nv

Other

Johannes Lechner

Detlef Gerhard

Eckhard Marx

Martin Renner

Volker Tegeder

The invention relates to a gripper for handling frames () that are covered with a film () that is intended for the transport of wafers (). The gripper comprises at least two flat fingers () that carry flattened finger tips (). This construction allows to insert the gripper between two frames () that are mounted in a cassette () without complication. The fingers () support in subsections both the frame () and the film (). The film is attached to the frame due to the suction effect exerted by vacuum openings () configured on the frame, thereby fixating the film on the gripper.

Gripper and method of operating the same

The orientation of the surface of an object to be examined is changed by adjusting the distance thereof to an optical measuring system in a plane-parallel manner in relation to a focusing plane of the optical measuring system, enabling high speeds of examination to be obtained during examination of the extended surfaces of the object. A distance-measurement system which is mounted in an auxiliary manner with regard to the measuring head enables fluctuations in the topography inside the surface of the object to be compensated in such a way that a currently received point or area can be optically sharpened.

Device and method for plane-parallel orientation of a the surface of an object to be examined in relation to a focus plane of a lens

An inspection system optically examines the surfaces of objects to detect surface errors. The system scans image strips and, consequently, a given surface rapidly and with sufficient resolution using a linescan camera and an upstream microscope by aligning the captured lines.

System for inspecting the surfaces of objects

A metrology device is described which is couplable to a load port of a semiconductor product handling and/or processing tool. The tool encloses a mini-environmental atmosphere and has a load port table for supporting devices to be coupled to the load port. The metrology device contains a housing preserving an inner atmosphere, a coupling region for connecting the inner atmosphere to the mini-environmental atmosphere and a measuring device for measuring a property of a semiconductor product. The metrology device further has a support which is movable by a transport device and which is dimensioned such that the metrology device is self-supporting in a position appropriate for coupling the coupling region to the load port. The metrology device is thereby couplable to the load port without being supported by the load port table.

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Munich, Germany

Johannes Lechner