Carl Zeiss Smt Gmbh

Carl Zeiss Laser Optics Gmbh

Johannes Kraus

Jeffrey Erxmeyer

Michael Schall

Holger Muenz

Michel Le Maire

Oliver Gloeckl

Ulrich Weber

Vitaliy Shklover

Willi Anderl

Markus Bauer

Konstantin Forcht

Horst Feldermann

Ingrid Schuster

Ute Heinemeyer

Alois Herkommer

Bernhard Weigl

Markus Deubel

An optical assembly reduces a spectral bandwidth of an output beam of a laser. The assembly includes a beam-expanding optical unit within a laser resonator. The latter serves to increase a beam cross section of a resonator-internal laser beam in at least one expansion cross-sectional dimension such that at least one resonator-internal expansion laser beam section arises. The assembly also includes an optical grating in a retroreflective arrangement for the resonator-internal laser beam. A beam-limiting stop acts in the expansion cross-sectional dimension and is arranged in the beam path of the expansion laser beam section. This yields an optical assembly in which unwanted thermal effects on account of optical components of the optical assembly heating during laser operation due to a local power density of the resonator-internal laser beam are reduced or avoided.

Optical assembly for reducing a spectral bandwidth of an output beam of a laser

An optical system, in particular for microlithography, includes a beam splitter, which has at least one light entry surface. The beam splitter is arranged in the optical system so that the angles of incidence with respect to the surface normal which occur at the light entry surface during operation of the optical system lie in the range of 45°±5°. The beam splitter is produced in [] the crystal cut.

Optical system in particular for microlithography

A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

Beam reverser module and optical power amplifier having such a beam reverser module

In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein

Optical element

A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers &#x2267;1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra&#x2014;recorded by the at least one detector&#x2014;of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.

Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement

Growing community of inventors

Theilheim, Germany

Johannes Kraus