Asml Netherlands B.v.

Johannes Cornelis Jacobus De Langen

Marcel Nicolaas Jacobus Van Kervinck

Vincent Sylvester Kuiper

Christiaan Otten

Arjen Benjamin Storm

Aaron Yang-Fay Ayal

Johan Frederik Cornelis Van Gurp

Laura Dinu Gurtler

Michiel Matthieu Bruinink

Christiaan Ruben Van Den Berg

Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.

Stack alignment techniques

An electronic device comprising a semiconductor chip which comprises a plurality of structures formed in the semiconductor chip, wherein the semiconductor chip is a member of a set of semiconductor chips, the set of semiconductor chips comprises a plurality of subsets of semiconductor chips, and the semiconductor chip is a member of only one of the subsets. The plurality of structures of the semiconductor chip includes a set of common structures which is the same for all of the semiconductor chips of the set, and a set of non-common structures, wherein the non-common structures of the semiconductor chip of the subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a first portion of the non-common structures and a first portion of the common structures form a first non-common circuit, wherein the first non-common circuit of the semiconductor chips of each subset is different from a non-common circuit of the semiconductor chips in every other subset. At least a second portion of the non-common structures is adapted to store or generate a first predetermined value which uniquely identifies the first non-common circuit, wherein the first predetermined value is readable from outside the semiconductor chip by automated reading means.

Secure chips with serial numbers

Growing community of inventors

Delft, Netherlands

Johannes Cornelis Jacobus De Langen