Asml Netherlands B.v.

U.S. Philips Corporation

Johannes Cornelis Driessen

Jakob Vijfvinkel

Theodorus H J Bisschops

Adrianus Gerardus Bouwer

Hermanus M J R Soemers

Michael J M Renkens

Johannes Petrus Martinus Bernardus Vermeulen

Theodorus Hubertus Josephus Bisschops

Antonius Maria Rijken

Hermanus Mathias Joannes Rene Soemers

Michael Jozefa Mathijs Renkens

Peter Martens

Nicolaas Lambert

Siebe Tjerk De Zwart

Gerardus G Van Gorkom

Petrus H Trompenaars

Edwin A Montie

Theunis S Baller

Jan G Dil

Hugo Matthieu Visser

Ronald Maarten Schneider

Hendricus F Van Tongeren

Jan W Kokkelink

Antonius J Rademakers

Marinus J J Dona

Mark T Meuwese

Wichert Mesman

Michel A Mors

A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic apparatus, device manufacturing method and device manufactured thereby

A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing

Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus

A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses

A reference frame provided in a vacuum chamber is supported by support pillars extending through and isolated from the vacuum chamber walls to isolate the reference frame from vibrations in the vacuum chamber. The gap between the support pillar and the vacuum chamber wall may be sealed by a low-stiffness seal. The low stiffness seal may be a three part seal allowing relative motion in six-degrees of freedom.

Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses

An object table is supported in a vacuum chamber by an elongate beam or beams extending through elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Movable support in a vacuum chamber and its application in lithographic projection apparatuses

A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses

A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.

Multi-stage drive arrangements and their application in lithographic projection apparatuses

An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

A method of manufacturing a dynamic groove bearing having parts rotatable relative to one another. The bearing parts include cooperating bearing surfaces and a pattern of grooves by means of a metal-removing tool. A first bearing part is fastened to a rotatable support of a machine tool, which is rotated in a constant direction. The tool is periodically displaced relative to the first bearing part parallel to a direction transverse to the bearing surface of the first bearing part by a positioning device with a frequency which is determined by a product of a rotation frequency of the support and a number of grooves on the bearing surface of the first bearing part. The tool is periodically displaced in a sinusoidal movement and the positioning device may include a piezoelectric actuator (95). A data storage unit including dynamic groove bearings is also provided.

Method of manufacturing a dynamic groove bearing by means of a

A flat display device is provided with a wire cathode or wire cathodes and with apertures which allow passage of electrons emitted by the wire cathode. The wire cathode is stretched in a wire-cathode support having positioning grooves for the wire cathode. This support engages the element in which the passages are made. The support and the element are provided with corresponding contacting surfaces.

Display device having a support structure for a wire cathode

The invention relates to an optoelectronic device comprising a semiconductor laser enclosed in an envelope, an optical fibre coupled to the semiconductor laser, and further coupled to at least one optical isolator and an outgoing optical fibre (pigtail). According to the invention, the semiconductor laser and the optical isolator are each enclosed in a separate module. The laser module mainly provides space to the semiconductor laser and to an optical fibre coupled thereto and ending in a ferrule in a tubular projection of the laser module. The module for the optical isolator is tubular in shape and contains in that order a first graded index lens, an optical isolator, a second graded index lens, and an outgoing optical fibre (pigtail) coupled to this second graded index lens through a ferrule. The tubular projection of the laser module and an end portion of the tubular optical module are so shaped in relation to one another that a mechanical coupling of the two modules can be obtained whereby the optical coupling between the modules is achieved simultaneously.

Optoelectronic device comprising a semiconductor laser and an optical

An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.

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Eindhoven, Netherlands

Johannes Cornelis Driessen