Leybold Systems Gmbh

Unaxis Deutschland Holding Ag

Johannes Beul

Stefan Bangert

Hans Schussler

Stefan Kunkel

Michael K&ouml;nig

Hans Maidhof

A device for gripping and holding a compact disc comprising a housing, a plurality of grippers that are arranged in said housing, each of said grippers being provided with a magnet, said gripper being guided in recesses in the housing which allow a movement of each gripper transverse to a vertical axis of said housing and cooperating with an electromagnet. The magnetic field axis of which coincides with the vertical axis (H) of the housing (,) and which moves the grippers (,, . . . ) back and forward between two limit stops (a, b) depending on the polarity of the electromagnet (,). The housing (,) is encompassed with play by a holder (,), wherein elements (,, . . . ) of an elastic material are provided between the holder (,) and the housing (,), namely in the part (,) of the housing (,) that is encompassed by the holder (,). The grippers (,, . . . ) respectively contain two limbs (,, . . . ), one of which (,, . . . ) extends downward perpendicular to the first limb (,, . . . ) and encompasses the edge of the central opening (,) of the substrate (,) with its end.

Device for gripping and holding a flat substrate

A vacuum treatment system for depositing thin coatings on substrates, with several stationary treating chambers that are held by the annular or frame-like side wall of the vacuum chamber and display the treatment tools and with treatment chamber openings aligned peripherally inward on the center of the vacuum chamber and extending in planes parallel to each other, a shaft, extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate of the vacuum chamber, is provided that moves the plates for closing the treatment chamber openings and is supplied with actuators for moving the closing plates from a radially inner opening position to a radially outer closing position, whereby the actuators working together with the shaft are designed as lever pinions.

Vacuum treatment system for depositing thin coatings

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Rehe, Germany

Johannes Beul