Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Johannes Adrianus Cornelis Theeuwes

Gerardus Johannes Nicolaas Doodeman

Gerrit Oosterhuis

Jeroen Anthonius Smeltink

Egbert Anne Martijn Brouwer

Joris Sijs

Zoltan Papp

Martin Willem Nelisse

Bart Driessen

Bartholomeus Joannes Franciscus Driessen

A method for providing position control information for controlling an impingement position of a laser beam for treatment of a chip die in a chip manufacturing process, comprises the steps of a) receiving a specification of positions (x,y) of a electrically conductive elements in the chip die, the positions having a first coordinate along a first direction (x) and a second coordinate (y) along a second direction in a plane defined by the chip die, said first and second direction being mutually transverse to each other, b) selecting a cluster of positions that is within a predetermined two-dimensional spatial range, wherein each pair of positions in the cluster at least has a first minimum difference in their first coordinates or a second minimum difference in their second coordinates and removing the next position from the ordered set, c) update the positions of the set of positions in accordance with an expected time needed to carry out the treatment for said cluster and a speed of a wafer comprising the chip die, d) repeating steps b-d until each of the positions in said set is assigned to a cluster.

Providing a chip die with electrically conductive elements

System for remote measuring a physical variable comprising an RF transceiver arranged for transmitting an RF signal and for receiving a reflection signal derived from the transmitted signal. An RF transponder comprises a dielectric material having a dielectric property which is dependent on the physical variable according to a first function. The dielectric material is exposed to the physical variable to be measured. The transponder is arranged to receive the signal transmitted by the transceiver and to reflect a reflection signal, or the second and/or higher harmonics of it, which is dependent on the actual dielectric property. Processing means are provided for comparing the signal transmitted by the transceiver and the reflection signal received from the transponder and for converting the comparison result, e.g. the phase shift, into a value which is representative for the physical variable to be measured. The transponder may be e.g. a patch antenna.

Method for remote measuring of a physical variable

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The Hague, Netherlands

Johannes Adrianus Cornelis Theeuwes