Fei Comapny

Johannes A H W G Persoon

Andreas Theodorus Engelen

Rudolf Johannes Peter Gerardus Schampers

Mathijs Petrus Wilhelmus Van Den Boogaard

Michael Frederick Hayles

Ruud Schampers

The invention relates to a charged particle microscope (CPM) that at least includes a sample holder, for holding a sample, and a manipulator device arranged for transferring a lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability, accessibility, and monitorability of the manipulator device during use.

Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope

Described is a system and method for in situ sample preparation and imaging. The system includes a multi-axis stagehaving a bulk stageand a grid stagewith various degrees of freedom to allow for sample preparation. In some embodiments, a focused ion beam system is used to prepare a lamella on the bulk stage. The lamella can then be transferred to the grid stagefrom the bulk stagewithout needing to move the multi-axis stagefrom the focused ion beam system.

Growing community of inventors

Eindhoven, Netherlands

Johannes A H W G Persoon