Siemens Aktiengesellschaft

Johann Otto

Hans-Detlef Brust

Peter Fazekas

Hans-Peter Feuerbaum

Erich Plies

Ralf Schmid

Ulrich Knauer

Eckhard Wolfgang

Martin Honsberg-Riedl

Hans D Brust

Erwin Knapek

Hans P Feuerbaum

Daniela Bernklau

An inductive component, for the formation of a magnetic circuit has at least one wire winding and at least one core with a ferromagnetic core material. The core comprises a gap and at least one further gap to interrupt the magnetic circuit. The inductive component is characterized in that the gaps each have a gap width of at least 1.0 mm. The core comprises two pieces, for example, which are arranged opposed to each other across the gaps and separated from each other by the gap width. The component is advantageously symmetrical with an essentially equal gap width for the gaps. A miniaturized inductive component is possible by the use of a hire winding made from high frequency braided wire and core material capable of accepting high frequencies, which has a high Q-factor even on a high power throughput and thus low electrical losses. In order to increase the Q-factor, the inductive component also has a cooling device for cooling the wire winding. The device is thus provided with a composite material with a thermally-conducting filler. The inductive component is used in a so-called electronic ballast (EVG) in the field of illumination.

Inductive component and use of said component

Conventional beam blanking system generate electron pulses having a minimum width of about 100 through 200 ps. Although a reduction of the pulse width to a few tens of picoseconds is fundamentally possible, the reduction of the probe current accompanying this would result to a considerable lengthening of the measuring times. In the invention a photo-cathode (PK) is charged by a pulsed laser beam (LA) which is attached to the column of an electron beam measuring instrument and the photo-electron source is stigmatically imaged onto the beam axis (OA1) using a focusing deflection unit (SFM). A sector field magnet is used as a focusing deflection unit (SFM).

Electron beam measuring instrument

A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display means for controlling the intensity of the probe.

Method and apparatus for operating a scanning microscope

A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display for controlling the intensity of the probe.

Evaluating method and apparatus for a test voltage by use of a bandwidth-limited evaluation circuits. For evaluation of a measured signal dependent on a variable parameter, an identification is first undertaken with a broad-band evaluation circuit to determine whether an interesting sub-region of the overall variation region of the parameter has been reached. When this is the case, then a reduction of the bandwidth of the evaluation circuit and a reduction of the variation rate of the parameter occurs in order to be able to evaluate with high sensitivity in the interesting sub-region.

Method and arrangement for evaluating a test voltage by means of a

A method and apparatus for determination of specific points on a specimen carrying a signal having a specific signal frequency by use of a scanning microscope. A detector provides a secondary electrical signal corresponding to respective particular scan points. An output of the detector connects to first and second evaluation circuits which each output a signal based on and representative of the specific signal frequency. The first evaluation circuit has a band-width substantially narrower than the second evaluation circuit. An output signal of the second evaluation circuit determines when to switch a scanning generator of the scanning microscope from a first scan rate to a second slower scan rate. The output signal of the first evaluation circuit is employed for evaluation relative to the specific points carrying the specific signal frequency.

Method for the determination of points on a specimen carrying a specific

A circuit for preventing burn-in spots on the picture screen 23 of a visual display 2 comprising an electron beam 19 that is intensity modulated and positioned controlled by way of a deflection system 21, 22 as, for example, for a scanning electron microscope. The protection to prevent burn-in spots utilizes a circuit wherein the signal input 24 of at least one deflection system 21 is electrically connected to a differentiator which produces an output that is connected to the first input of a comparator which also receives a reference voltage and the comparator output is switched to the input of a retriggable trigger circuit so as to control the intensity of the electron beam 19 and thus prevent burn-in on the picture screen.

Circuit for preventing burn-in spots on the picture screen of a visual

A method and apparatus localize weak points within an electrical circuit. The electrical circuit is covered with a liquid crystal and is heated to a temperature just below the clearing point of the liquid crystal. The liquid crystal converts into its unordered condition given a temperature increase and leakage channel within the integrated circuit are completely localized. By irradiating a three-dimensional region, at least one current is induced in the region by generating electron-hole pairs within the electrical circuit, this at least one current causing a temperature increase at at least one weak point of the electrical circuit.

Method and apparatus for localizing weak points within an electrical

A method for emphasizing a portion of an area of a subject being scanned by a scanning microscope wherein a subject is scanned with a particle probe of the microscope moving at a given scanning speed along a line with a given space between lines and wherein the image is reproduced on the image recording device having a given scanning speed along each image line and a given spacing between the image lines characterized by enlarging selected portions of the image by selectively varying the scanning speed and spacing between the lines of at least one of the particle probe and image recording devices. The method enables producing an enlarged portion of an area of the subject being observed with the surrounding portions of the area being simultaneously produced to enable a significantly faster and more reliable discovery of the portion of the area of the subject which is of interest.

Method of emphasizing a subject area in a scanning microscope

A method for representing logic changes of state occurring at a plurality of adjacent circuit nodes in an integrated circuit in the form of a logic image employs a pulsed electron probe which always scans a same path in the x-direction on the integrated circuit and the phase of the electron pulses comprising the pulsed electron probe is continuously shifted for each new scanning operation. The integrated circuit can be imaged up to the edge of a recording or field of view limit and it is only at this limit that the y-deflection of the pulsed electron probe is fixed. Very small spacings, such as those occurring between adjacent integrated circuit tracks, can thus be reliably imaged on the picture screen of the scanning electron microscope.

Method for representing logical status changes of a plurality of

A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.

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Bad Toelz, Germany

Johann Otto