Siemens Aktiengesellschaft

Johann Kammermaier

Siegfried Birkle

Gerhard Rittmayer

Albert Hammerschmidt

Gerhard Schmidt

Albrecht Winnacker

Peter Roedl

Rolf-W Schulte

Rolf-Winfried Schulte

Rainer Leuschner

Hellmut Ahne

Roland Rubner

Wolfgang Kleeberg

Rolf Schulte

Hermann Heywang

Erwin Heuwieser

Rudiger Mueller

Wolf Kleeberg

Joachim Rauhut

In the case of a photocell based on gallium arsenide or indium phosphide, a layer of amorphous, hydrogenous carbon (a-C:H) having a thickness of .ltoreq.0.1 .mu.m and a specific electrical resistance of .gtoreq.10.sup.6 .OMEGA..cm is placed on a layer of p-doped gallium arsenide (GaAs) or indium phosphide (InP).

Photocell

A Metal Insulator Semiconductor Field-Effect Transistor (MISFET) has an insulating layer arranged between a gate electrode and a semiconductor substrate. The insulating layer is a layer of amorphous, hydrogenated carbon (a-C:H) with a thickness--in the region of the gate electrode--of up to 1 .mu.m, and with a resistivity (.eta.) greater than or equal to 10.sup.6 .OMEGA..multidot.cm at the boundary surface to the semiconductor substrate. The semiconductor substrate consists of a semiconductor material other than silicon.

Metal insulator semiconductor field effect transistor

Hard, mechanically and chemically stable protective layers for electroactive passivation layers of semiconductor components, which also act as diffusion barriers against moisture and ions, comprise a thin layer of amorphous, hydrogenated carbon.

Protective layer for electroactive passivation layers

An electrophotographic recording material is applied on a plate-shaped or drum-shaped substrate in a layer structure of superposed layers which comprises a photoconductive layer and at least the uppermost layer is fashioned of amorphous, hydrogen-containing carbon. The amorphous, hydrogen-containing carbon layer is deposited from a radio frequency excited low-pressure plasma with gaseous hydrocarbon as a reaction gas and in which a self-bias DC voltage is superimposed on the radio frequency field. The a-c:H material obtained in this manner is semiconducting and has photoconductive properties so that it can be employed for the photoconductive layer of the electrophotographic recording material.

Electrophotographic recording material and method for the manufacture

Starting from hydrocarbons and/or fluorocarbons, glow polymerisate layers can be generated on a substrate by means of a high-frequency low-pressure glow discharge. Chemically stable layers are obtained if the glow polymerisate is subjected, after the preparation and with the exclusion of air, to an annealing process in an atmosphere of hydrocarbon and/or fluorocarbon monomers at temperatures between 100.degree. and 450.degree. C. for 1 to 10 hours, or if the substrate is heated to temperatures between 100.degree. and 450.degree. C. during the preparation of the glow polymerisate.

Method for generating glow-polymerisate layers

Method for the plasma deposition of hydrogenated, amorphous carbon using

The invention provides electroactive passivation layers for semiconductor components comprising a thin layer of amorphous, hydrogenated carbon.

Amorphous, hydrogenated carbon electroactive passivation layer

A capacitive moisture sensor with a dielectric consisting of a moisture sensitive polymer which is mounted between two electrodes fulfills all the requirements of capacitive moisture sensors to a high degree, in particular with regard to a high long-term stability, when the organic polymer is a polybenzoxazole or a polybenzothiazole.

Capacitive moisture-sensor

A planarizing dielectric, which is particularly suitable for electronic components, fulfills the required properties to a high degree when it comprises a matrix of a high-temperature resistant, organic polymer, into which matrix is intercalated in fine distribution a solid filler material, which is etchable in oxygen plasma, has high thermal conductivity and good dielectric properties.

Planarizing dielectric

Layers consisting of vinylidene fluoride polymers or vinylidene fluoride/trifluoroethylene copolymers can be prepared with a thickness of &lt;10 .mu.m, whereby the dielectric constant or the ferroelectric properties simultaneously correspond to those of known materials. Vinylidene fluoride or a mixture of vinylidene fluoride and trifluoroethylene in a concentration of .ltoreq.5.times.10.sup.-9 mol/cm.sup.3 is subjected to a low pressure plasma polymerization which is excited by microwaves, and the polymer or copolymer is deposited onto a substrate at an electric field strength of &lt;850 V/cm.

Method of preparing layers of vinylidene fluoride polymers and

Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E.sub.0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.

Method for producing glow polymerisate layers

A quantity of flow meter, includes two electrical conductors which are traversed by current and are physically traversed by a flowing medium to be measured. The increase of the current required for maintenance of the temperature difference between the two conductors is evaluated as a measurement of the quantity of flow. The meter is particularly versatile and can be employed for a wide voltage range and includes resistors as the electrical conductors which are thin resistor layers applied upon a thin carrier.

Quantity of flow meter

A multi-layered capacitive humidity sensing element having a carrier material separated from a water vapor permeable, electrically conductive coating by an insulating layer which is humidity sensitive, and a method for its manufacture is provided. A metal foil is utilized as the carrier material serving both as a support frame and as an electrically conductive layer. A thin gold layer is applied to the insulating layer, which is formed out of a synthetic material. The gold layer is sufficiently permeable to allow water vapor to freely diffuse into the synthetic layer from the surrounding atmosphere, yet remains thick enough to function as an electrically conductive outer layer. The sensing element thus constructed has both a short response time and an improved simplicity of manufacture.

Capacitance humidity sensing element

A device for measuring the fill level in a container at least partially filled with a liquid, particularly for determining the liquid level in a fuel tank, in which a measuring resistor, comprising a metallic resistance layer having a great temperature coefficient of the specific resistance is carried by a carrier foil. The portion of the resistance layer disposed in the liquid remains cold, while that portion above the liquid is at a higher temperature, whereby the difference between the present resistance and that of an empty tank is proportional to the fill level within the tank. The change of resistance preferably is measured in connection with that of a comparator resistor which is not heated and compensates for temperature influence etc. An influence on the measurement due to convection in the fuel tank is prevented by means of covering sheets which are spaced a small distance from the resistors by means of suitable spacing strips.

Growing community of inventors

Unterhaching, Germany

Johann Kammermaier