U.S. Philips Corporation

Johan W De Vries

Mareike K Klee

Detlev F Hennings

Robertus A Wolters

Hans-Wolfgang Brand

Rainer M Waser

Uwe Dibbern

The invention provides a novel type of piezoelectric element. This element comprises a number of piezoelectric layers of a ceramic material and a number of electrode layers of a silver-palladium alloy. The piezoelectric layers and the electrode layers are stacked alternately to form a multilayer. This multilayer is also provided with at least two external electrical connections which are in contact with a number of said electrode layers. In accordance with the invention, the composition of the main component of the ceramic material corresponds to the formula:

Piezoelectric element

A method of manufacturing monolayer capacitors having a ferroelectric layer on the basis of titanium as a dielectric on a substrate, the ferroelectric layer being located between a first and a second noble metal electrode, in which the ferroelectric layer is formed as a barium titanate layer having a layer thickness in the range of from 0.2 to 0.6 .mu.m in that a stable solution of salts of carbonic acids, alkoxides and/or acetyl acetonates is applied and is thermally decomposed at temperatures in the range of from 500.degree. to 700.degree. C., the solution constituting the ferroelectric layer being adjusted so that after the thermal decomposition process an excess quantity of titanium oxide of about 1 mol. % is obtained, and this coating process being repeated until the desired layer thickness is attained, after which the second noble metal electrode is provided on the ferroelectric layer.

Method of manufacturing mono-layer capacitors

Growing community of inventors

Eindhoven, Netherlands

Johan W De Vries