Asm International N.v.

Johan Siegers

Jan Zinger

Kornelius Haanstra

A handheld device for use in a wireless environment to operate an apparatus is provided. The handheld device sends a request to an apparatus controller to initiate a maintenance sequence. The handheld device receives information from the apparatus controller to control the operation of the maintenance sequence. The handheld device sends a maintenance command to the apparatus controller. The handheld device then receives information regarding the state of the apparatus after the maintenance command is executed.

Method and system for using short ranged wireless enabled computers as a service tool

A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.

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Amersfoort, Netherlands

Johan Siegers