Université Paris-Sud 11

Lynred

Université Du Maine

Scientifique (cnrs)

Universite Paris-saclay Centre National De La Recherche

Centre National De La Recherche Scientifique

Université Paris—sud

Université Paris-Saclay

Johan Moulin

Guy Lemarquand

Elie Lefeuvre

Valérie Lemarquand

David Bunel

Sylvain Lemettre

Marion Alexandra Laurence Woytasik

Alain Bosseboeuf

Fabien Jean François Parrain

Elie Marie Lefeuvre

A hermetic housing is disclosed () for an optoelectronic component () or a MEMS device configured to form an enclosure () within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window () transparent for at least one wavelength of interest (&#x3bb;); and a layer of a getter material () configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1&#x2212;P)*e_t&#x3c;&#x3bb;/2&#x3c0;k with &#x3bb; corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.

Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method

The present invention relates to the field of electrodynamic speakers. Particularly, the present invention relates to an electrodynamic speaker structure having MEMS technology. More particularly, the invention relates to such a structure comprising stator-forming means, diaphragm-forming means, and resiliently shape-changing means for connecting such means.

Electrodynamic speaker structure having MEMS technology

Growing community of inventors

Antony, France

Johan Moulin