Carl-Zeiss-Stiftung

Cymer, Inc.

Carl Zeiss Industrielle Messtechnik Gmbh

Joerg Walther

Palash P Das

Thomas Hofmann

Kurt Brenner

Guenter Grupp

Berthold Matzkovits

Volker Piwek

Klaus Jacobs

Michael Hoell

Otto Boucky

Ernst Stump

Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

In a coordinate measurement device with a base frame, a measurement table supported at the latter for holding an object to be measured, a sensing device for sensing the surface of this object, and with a positioning device for moving the sensing device in three spatial axes over the measurement table, which positioning device is mounted at the base frame and carries the sensing device, the positioning device has a first slide which is guided at the base frame in a first direction and which is movable on one side of the measurement table toward and away from the latter and on which a second slide is movable in a second direction vertical to the first direction, this second slide being provided at its end area remote of the measurement table (considered in its movement direction) with a supporting portion which projects lateral to the measurement table and at which there is arranged a stirrup arm which projects over the measurement table in a direction vertical to a principal work plane of the measurement table. This stirrup arm carries the sensing device at its free end over the measurement table and is constructed as an element that is rigid per se. The first slide and the front area of the second slide situated in front of the supporting portion considered in the movement direction of the first slide can be moved under the measurement table during the movement of the positioning device toward the measurement table.

Coordinate measurement device

Growing community of inventors

Gerstetten, Germany

Joerg Walther