Robert Boschgmbh

Joerg Buth

Klaus Heyers

Christoph Treutler

Franz Laermer

Hans Hecht

Jiri Marek

Roland Mueller-Fiedler

Herbert Goebel

Martin Zechnall

Manfred Lembke

Steffen Schmidt

Martin Willmann

Manfred Moellendorf

Andreas Lock

Michael Gundlach

Hans-Ulrich Gruber

Christoph Kampshoff

With a sensor and method, it is possible for platinum resistor elements to be used advantageously as heating elements, temperature sensors, printed circuit traces, or as chemically resistant electron beam sensitive layers. To ensure a long-lasting adhesion of the platinum resistance layer to a dielectric substrate, even during exposure to temperatures which are elevated over ambient temperature and under dry and most atmospheric conditions, a thin adhesion layer of platinum silicide, for example, is deposited between the platinum resistance layer and the dielectric substrate. Resistor elements patterned from the platinum layer can advantageously be used in temperature sensors, mass flow sensors, chemical sensors, gas sensors, or humidity sensors.

Sensor and method for manufacturing a sensor

A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.

Sensor having a thin film element

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Gerlingen, Germany

Joerg Buth