Leibniz-Institut Fuer Festkoerper-Und Werkstoffforschung Dresden E.v.

Joerg Buschbeck

Sebastian Faehler

Michael Thomas

Jeffrey McCord

Oleg Heczko

The invention relates to the field of materials science and relates to a component, which can be used, for example, for microcomponents, microsensors and microactuators. The object of the present invention is to disclose a component in which a clearly greater relative length change occurs. The object is attained through a component of a ferromagnetic shape memory material, produced by a method in which at least one sacrificial layer is applied onto a single-crystalline or biaxially textured substrate, onto which sacrificial layer an epitaxial or textured layer of a ferromagnetic shape memory material with a layer thickness of &#x2266;50 &#x3bc;m is applied, subsequently the sacrificial layer is removed at least partially, and during or after the layer application a structuring at least of the ferromagnetic shape memory material is realized such that an aspect ratio is achieved in which at least one length is greater by at least a factor of 3 than the thickness of the layer or the shortest dimension of the component.

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Goleta, CA, United States of America

Joerg Buschbeck