Robert Boschgmbh

Joerg Braeuer

Johannes Classen

Lars Tebje

Torsten Ohms

Amin Jemili

Christian Hoeppner

Christof Schwenk

Holger Rumpf

A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

Micromechanical system, method for operating a micromechanical system

A sensor system including a plurality of individual and separate sensor elements. Each of the individual sensor elements is independently functional. The individual sensor elements of the sensor system being formed in one piece from parts of a wafer or a vertically integrated wafer stack. The sensor system including at least one separation structure, in particular a scribe line, between the individual and separate sensor elements.

Sensor system, including a plurality of individual and separate sensor elements

A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed.

Method for manufacturing a MEMS element

Growing community of inventors

Nehren, Germany

Joerg Braeuer